Abstract
A silicon MIS structure with sulfonate-containing aromatic polyamide as a gate insulator is prepared with the aim of using it as a capacitive-type humidity detector. A detector made of this material offers a high sensitivity at an elevated relative humidity and a high speed of response. Measurements of the capacitance of the structure at different frequencies basically make it possible to determine the water distribution in the polymer matrix. The high-frequency (1 MHz) capacitance versus relative humidity dependence (i.e., the calibration curve of the detector) is typical of the isotherms of water vapor sorption by similar polymers.
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Translated from Zhurnal Tekhnichesko\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \) Fiziki, Vol. 75, No. 8, 2005, pp. 85–89.
Original Russian Text Copyright © 2005 by E.A. Tutov, Bormontov, Pavlenko, Netesova, E.E. Tutov.
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Tutov, E.A., Bormontov, E.N., Pavlenko, M.N. et al. MIS structure with polyamide insulator under the conditions of water vapor sorption. Tech. Phys. 50, 1048–1052 (2005). https://doi.org/10.1134/1.2014537
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DOI: https://doi.org/10.1134/1.2014537