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Transparent MIS capacitors on plastic substrates fabricated by high-frequency ultrasonic spray pyrolysis

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Abstract

In this article, the fabrication and characterization of transparent metal-insulator-semiconductor (MIS) capacitors on plastic substrates are presented. Zinc oxide and indium tin oxide films were used as semiconductor layer and electrode, respectively. The thin films were deposited by a home-made high-frequency ultrasonic spray pyrolysis deposition system. Polyethylene terephthalate is used as plastic substrate. The maximum temperature of the process was 200°C. The MIS capacitors exhibit above 70% of transparency and operate at ±1 V. Therefore, the transparent devices are compatible with low-power electronics. Moreover, the thin films were characterized by Fourier transform infrared spectroscopy, X-ray diffraction, field emission scanning electron microscope and Raman spectroscopy.

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Acknowledgements

This study was partially supported by Fondo Sectorial de Investigación para la Educación CONACYT-SEP Ciencia Basica [Grant Number A1-S-7888] and by VIEP-BUAP [Grant Number DJMA-EXC17-G]. We want to thank the personnel of the Flexible Electronics Research Lab at Ecocampus-BUAP for the assistant in the fabrication of the structures used in this study. Dominguez thanks Filmtronics Inc. PA, USA, for the supplies provided. Obregon would like to thank CONACYT-Mexico for the scholarship award.

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Authors and Affiliations

  1. Centro de Investigaciones en Dispositivos Semiconductores, Instituto de Ciencias, Benemérita Universidad Autónoma de Puebla (BUAP), 72570, Puebla, Mexico

    Ovier Obregon, José A Luna-Lopez & Miguel A Domínguez

  2. Electronics Department, National Institute for Astrophysics, Optics and Electronics (INAOE), 72840, Puebla, Mexico

    Pedro Rosales & Mario Moreno

  3. Centro de Investigación en Biotecnología Aplicada (CIBA), Instituto Politécnico Nacional, 72197, Tlaxcala, Mexico

    Abdu Orduña-Diaz

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  1. Ovier Obregon
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  2. José A Luna-Lopez
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  4. Mario Moreno
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  5. Abdu Orduña-Diaz
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  6. Miguel A Domínguez
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Correspondence to Miguel A Domínguez.

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Obregon, O., Luna-Lopez, J.A., Rosales, P. et al. Transparent MIS capacitors on plastic substrates fabricated by high-frequency ultrasonic spray pyrolysis. Bull Mater Sci 44, 160 (2021). https://doi.org/10.1007/s12034-021-02468-5

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