Abstract
A kinetic analysis of the defect formation in a II–VI compound (ZnO) subjected to a flux of oxygen radicals has made it possible to develop a new method for obtaining single-crystal layers that uses a high-temperature heat treatment of the above single-crystal compound under these conditions. Using this method, a change from n-to p-type conductivity in ZnO is accomplished. This technology makes it possible to obtain heterostructures.
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Translated from Fizika i Tekhnika Poluprovodnikov, Vol. 39, No. 6, 2005, pp. 641–646.
Original Russian Text Copyright © 2005 by Kotlyarevsky, Rogozin, Marakhovski\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \).
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Kotlyarevsky, M.B., Rogozin, I.V. & Marakhovskii, A.V. Kinetics of defect formation in ZnO subjected to a flux of oxygen radicals. Semiconductors 39, 609–614 (2005). https://doi.org/10.1134/1.1944847
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DOI: https://doi.org/10.1134/1.1944847