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Electroluminescence in SiO2 layers in various structures

  • Semiconductors and Dielectrics
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Abstract

Electroluminescence (EL) in an electrolyte-insulator-semiconductor system is used to study oxide layers in Si-SiO2-Si3N4 and Si-SiO2 structures prepared using various techniques. The EL spectra of all the structures contained the 2.7-eV emission band characteristic of the radiative relaxation of excited sililene centers. A comparative study of the conditions conducive to the formation of such luminescence centers in various structures containing SiO2 layers was made, and their nature was refined.

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References

  1. A. P. Baraban, V. V. Bulavinov, and P. P. Konorov, Electronics of SiO 2 Layers on Silicon (Leningr. Gos. Univ., Leningrad, 1988).

    Google Scholar 

  2. A. P. Baraban, P. P. Konorov, A. A. Kruchinin, and Yu. A. Tarantov, Élektrokhimiya 20(4), 539 (1984).

    Google Scholar 

  3. A. P. Baraban, I. V. Klimov, N. I. Tenoshvili, et al., Pis’ma Zh. Tekh. Fiz. 15(17), 44 (1989) [Sov. Tech. Phys. Lett. 15, 680 (1989)].

    Google Scholar 

  4. A. P. Baraban and L. V. Miloglyadova, Zh. Tekh. Fiz. 72(5), 56 (2002) [Tech. Phys. 47, 708 (2002)].

    Google Scholar 

  5. A. P. Baraban, D. V. Egorov, A. Yu. Askinazi, and L. V. Miloglyadova, Pis’ma Zh. Tekh. Fiz. 28(23), 14 (2002) [Tech. Phys. Lett. 28, 978 (2002)].

    Google Scholar 

  6. A. P. Baraban, P. P. Konorov, L. V. Malyavka, and A. G. Troshikhin, Zh. Tekh. Fiz. 70(8), 87 (2000) [Tech. Phys. 45, 1042 (2000)].

    Google Scholar 

  7. P. Solomon and N. Klein, J. Appl. Phys. 47(3), 1023 (1976).

    Article  ADS  Google Scholar 

  8. D. J. Di Maria, J. R. Kirtley, and E. J. Pakulis, J. Appl. Phys. 56(2), 401 (1984).

    ADS  Google Scholar 

  9. T. N. Theis, J. R. Kirtley, and D. J. Di Maria, Phys. Rev. Lett. 50(10), 750 (1983).

    Article  ADS  Google Scholar 

  10. A. J. Pepe, W. Chen, and M. Oyler, J. Electrochem. Soc. 140(4), 1090 (1993).

    Google Scholar 

  11. A. Gee, J. Electrochem. Soc. 107(9), 787 (1960).

    Google Scholar 

  12. S. P. Maminova and L. L. Odynets, Élektrokhimiya 1(3), 365 (1965).

    Google Scholar 

  13. L. N. Skuya, A. N. Streletskii, and A. B. Pakovich, Fiz. Khim. Stekla 14, 481 (1988).

    Google Scholar 

  14. A. P. Baraban, E. A. Semykina, and M. B. Vaniouchov, Semicond. Sci. Technol. 15, 546 (2000).

    Article  ADS  Google Scholar 

  15. A. P. Baraban, E. A. Semykina, and M. B. Vaniouchov, Phys. Low-Dimens. Semicond. Struct., No. 3/4, 27 (2000).

  16. V. V. Afanas’ev, A. Stesmans, and A. G. Revesz, J. Appl. Phys. 82(5), 2184 (1997).

    ADS  Google Scholar 

  17. B. Garido, J. Samitier, and S. Bota, J. Non-Cryst. Solids 187, 101 (1995).

    Google Scholar 

  18. E. A. Semykina and T. E. Nikulina, in Abstracts of International Conference Dielectrics-97 (St. Petersburg, 1997), Part 2, p. 70.

  19. A. P. Baraban, I. V. Klimov, and P. P. Konorov, Vestn. Leningr. Univ., Ser. 4: Fiz. Khim. 4(25), 71 (1988).

    Google Scholar 

  20. V. A. Gritsenko, Atomic and Electronic Structure of Amorphous Insulators in Silicon MIS Devices (Nauka, Novosibirsk, 1993).

    Google Scholar 

  21. D. J. Di Maria and Y. R. Abernathey, J. Appl. Phys. 60(5), 1727 (1985).

    Google Scholar 

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Translated from Fizika Tverdogo Tela, Vol. 46, No. 4, 2004, pp. 749–753.

Original Russian Text Copyright © 2004 by Baraban, Konorov, Miloglyadova, Troshikhin.

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Baraban, A.P., Konorov, P.P., Miloglyadova, L.V. et al. Electroluminescence in SiO2 layers in various structures. Phys. Solid State 46, 770–774 (2004). https://doi.org/10.1134/1.1711472

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  • DOI: https://doi.org/10.1134/1.1711472

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