Abstract
We present an overview concerning the modification of properties of HgCdTe solid solutions and related Hg-containing materials under surface treatment with low-energy (60–2000 eV) ion beams. The conditions for conductivity-type conversion in p-material, dose, and time dependences of the depth of the conversion layer are analyzed. The modification of electrical properties of n-type material subjected to ion-beam treatment is discussed. The suggested mechanisms of conductivity-type conversion under low-energy ion treatment of HgCdTe doped with vacancies or acceptor impurities are regarded. Properties of p-n junctions produced by this technique are reviewed, and electrical and photoelectric parameters of HgCdTe IR photodetectors fabricated by low-energy ion treatment are analyzed. Several examples of novel device structures developed with the use of the method are presented.
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References
J. Piotrowski and A. Rogalski, Sens. Actuators A 67, 146 (1998).
M. A. Kinch, J. Electron. Mater. 29, 809 (2000).
A. Rogalski, Infrared Phys. Technol. 43, 187 (2002).
S. Krishna, A. D. Stiff-Roberts, J. D. Phillips, et al., IEEE LEOS Newsl. 16(1), 19 (2002).
A. Rogalski, Infrared Phys. Technol. 40, 279 (1999).
N. S. Baryshev, Properties and Applications of Narrow-Band Semiconductors (UNIPRESS, Kazan, 2000).
K. Fisher and N. Rappenau, U.S. Patent No. 4128467 (1978).
R. B. Withers, U.S. Patent No. 4301591 (1981).
M. V. Blackman and M. D. Jenner, U.S. Patent No. 4321615 (1982).
M. S. Nikitin and K. P. Pavlov, in Proceedings of VI All-Union Symposium on Semiconductors with Narrow Band Gap and Their Application (Lvov, 1983), p. 136.
U. Solzbach and H. J. Richter, Surf. Sci. 97(1), 191 (1980).
J. L. Elkind, J. Vac. Sci. Technol. B 10, 1460 (1992).
J. T. M. Wotherspoon, U.S. Patent No. 4411732 (1983).
I. M. Baker, U.S. Patent No. 4521798 (1985).
M. V. Blackman, D. E. Charlton, M. D. Jenner, et al., Electron. Lett. 23, 978 (1987).
P. Brogowski, H. Mucha, and J. Piotrowski, Phys. Status Solidi A 114, K37 (1989).
G. Bahir and E. Finkman, J. Vac. Sci. Technol. A 7, 348 (1989).
V. I. Ivanov-Omskii, K. E. Mironov, and K. D. Mynbaev, Semicond. Sci. Technol. 8, 634 (1993).
K. D. Mynbaev, N. L. Bazhenov, V. A. Smirnov, and V. I. Ivanov-Omskii, Pis’ma Zh. Tekh. Fiz. 28(22), 64 (2002) [Tech. Phys. Lett. 28, 955 (2002)].
E. Belas, P. Hoshl, R. Grill, et al., Semicond. Sci. Technol. 8, 1695 (1993).
R. Haakenaasen, T. Colin, H. Steen, and L. Trosdahl-Iversen, J. Electron. Mater. 29, 849 (2000).
R. Haakenaasen, T. Moen, T. Colin, et al., J. Appl. Phys. 91, 427 (2002).
I. I. Izhnin, A. I. Izhnin, K. R. Kurbanov, and B. B. Prytuljak, Proc. SPIE 3725, 291 (1999).
S. Rolland, R. Granger, and R. Triboulet, J. Cryst. Growth 117, 208 (1992).
V. I. Ivanov-Omskii, K. E. Mironov, and K. D. Mynbaev, Fiz. Tekh. Poluprovodn. (Leningrad) 24, 2222 (1990) [Sov. Phys. Semicond. 24, 1379 (1990)].
E. Belas, J. Franc, A. Toth, et al., Semicond. Sci. Technol. 11, 1116 (1996).
V. V. Bogoboyashchii, A. P. Vlasov, S. A. Dvoretskii, et al., in Abstracts of 2nd Russian-Ukrainian Seminar on Nanophysics and Nanoelectronics (Kiev, 2000), p. 63.
A. V. Dvurechenskii, V. G. Remesnik, I. A. Ryazantsev, and N. Kh. Talipov, Fiz. Tekh. Poluprovodn. (St. Petersburg) 27, 168 (1993) [Semiconductors 27, 90 (1993)].
J. F. Siliquini, J. M. Dell, C. A. Musca, and L. Faraone, Appl. Phys. Lett. 70, 3443 (1997).
V. G. Savitsky, L. G. Mansurov, I. M. Fodchuk, et al., Proc. SPIE 3725, 299 (1999).
J. F. Siliquini, J. M. Dell, C. A. Musca, et al., J. Cryst. Growth 184/185, 1219 (1998).
M. H. Rais, C. A. Musca, J. Antoszewski, et al., J. Cryst. Growth 214/215, 1106 (2000).
J. M. Dell, C. A. Musca, L. Faraone, et al., Microelectron. J. 31, 545 (2000).
P. Brogowski, J. Rutkowski, J. Piotrowski, and H. Mucha, Electron Technol. 24(3/4), 93 (1991).
É. Belas, J. Franc, R. Grill, et al., Neorg. Mater. 32, 949 (1996).
J. Antoszewski, C. A. Musca, J. M. Dell, and L. Faraone, J. Electron. Mater. 29, 837 (2000).
T. Nguen, J. Antoszewski, C. A. Musca, et al., J. Electron. Mater. 31, 652 (2002).
E. P. G. Smith, J. F. Siliquini, C. A. Musca, et al., J. Appl. Phys. 83, 5555 (1998).
V. V. Bogoboyashchii, A. P. Vlasov, and I. I. Izhnin, Izv. Vyssh. Uchebn. Zaved. Fiz. 44(1), 50 (2001).
N. N. Berchenko, V. V. Bogoboyashchiy, I. I. Izhnin, and A. P. Vlasov, Phys. Status Solidi B 229, 279 (2002).
N. N. Berchenko, V. V. Bogoboyashchiy, I. I. Izhnin, et al., Surf. Coat. Technol. 158–159, 732 (2002).
I. I. Izhnin, A. I. Izhnin, K. R. Kurbanov, and B. B. Prytuljak, Proc. SPIE 3182, 383 (1997).
E. Belas, P. Hoschl, R. Grill, et al., J. Cryst. Growth 138, 940 (1994).
E. Belas, R. Grill, J. Franc, et al., J. Cryst. Growth 159, 1117 (1996).
E. Belas, R. Grill, J. Franc, et al., J. Cryst. Growth 224, 52 (2001).
E. Belas, R. Grill, J. Franc, et al., J. Electron. Mater. 31, 738 (2002).
J. White, R. Pal, J. M. Dell, et al., J. Electron. Mater. 30, 762 (2001).
D. Shaw and P. Capper, J. Mater. Sci.: Mater. Electron. 11(2), 169 (2000).
H. F. Schaake, J. H. Tregilgas, J. D. Beck, et al., J. Vac. Sci. Technol. A 3, 143 (1985).
V. V. Bogoboyashchii and I. I. Izhnin, Izv. Vyssh. Uchebn. Zaved. Fiz. 43(8), 16 (2000).
V. V. Bogoboyashchii, A. I. Elizarov, V. I. Ivanov-Omskii, et al., Fiz. Tekh. Poluprovodn. (Leningrad) 19, 819 (1985) [Sov. Phys. Semicond. 19, 505 (1985)].
V. V. Bogoboyashchii and I. I. Izhnin, in Abstracts of XVII International Scientific and Technical Conference on Photoelectronics and Night Vision Devices (Moscow, 2002), p. 164.
I. M. Baker and C. D. Maxey, J. Electron. Mater. 30, 682 (2001).
M. P. Hastings, C. D. Maxey, B. E. Matthews, et al., J. Cryst. Growth 138, 917 (1994).
R. Haakenaasen, H. Steen, T. Lorentzen, et al., J. Electron. Mater. 31, 710 (2002).
N. N. Berchenko, V. V. Bogoboyashchiy, I. I. Izhnin, et al., in Abstracts of International Conference on Solid State Crystals (Zakopane, 2002), p. 197.
I. M. Baker, M. P. Hastings, L. G. Hipwood, et al., III-Vs Rev. 9(2), 50 (1996).
C. T. Elliott, N. T. Gordon, R. S. Hall, and G. Crimes, J. Vac. Sci. Technol. A 8, 1251 (1990).
N. L. Bazhenov, S. I. Gasanov, V. I. Ivanov-Omskii, et al., Fiz. Tekh. Poluprovodn. (Leningrad) 25, 2196 (1991) [Sov. Phys. Semicond. 25, 1323 (1991)].
R. E. DeWames, G. M. Williams, J. G. Pasko, and A. H. B. Vandervyck, J. Cryst. Growth 86, 849 (1988).
S. Sze, Physics of Semiconductor Devices, 2nd ed. (Wiley, New York, 1981; Mir, Moscow, 1984).
R. E. DeWames, J. G. Pasko, E. S. Yao, et al., J. Vac. Sci. Technol. A 6, 2655 (1988).
G. Bahir, V. Garber, and D. Resenfeld, Appl. Phys. Lett. 78, 1331 (2001).
J. M. Dell, J. Antoszewski, M. H. Rais, et al., J. Electron. Mater. 29, 841 (2000).
J. K. White, J. Antoszewski, R. Pal, et al., J. Electron. Mater. 31, 743 (2002).
C. Musca, J. Antoszewski, J. Dell, et al., J. Electron. Mater. 27, 740 (1998).
J. Piotrowski, Z. Nowak, J. Antoszewski, et al., Semicond. Sci. Technol. 13, 1209 (1998).
E. P. G. Smith, K. J. Winchester, C. A. Musca, et al., Semicond. Sci. Technol. 16, 444 (2001).
G. Bahir, V. Garber, and A. Dust, J. Electron. Mater. 30, 704 (2001).
O. P. Agnihotri, H. C. Lee, and K. Yang, Semicond. Sci. Technol. 17, R11 (2002).
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Translated from Fizika i Tekhnika Poluprovodnikov, Vol. 37, No. 10, 2003, pp. 1153–1178.
Original Russian Text Copyright © 2003 by Mynbaev, Ivanov-Omski\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \).
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Mynbaev, K.D., Ivanov-Omskii, V.I. Modification of Hg1−x CdxTe properties by low-energy ions. Semiconductors 37, 1127–1150 (2003). https://doi.org/10.1134/1.1619507
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DOI: https://doi.org/10.1134/1.1619507