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Influence of laser irradiation with hν=1.96 eV on the properties of titanium-silicon contact under thermal annealing in nitrogen

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Abstract

The effect of laser irradiation with hν=1.96 eV (λ=0.63 µm) on the properties of titanium-silicon contacts subjected to steady-state thermal annealing in a nitrogen atmosphere is studied. It is found that treatment-induced changes in the phase composition of the contact modify its electrophysical parameters. The applicability of laser irradiation to the formation of rectifying titanium-silicon junctions with desired parameters is demonstrated.

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References

  1. D. T. Alimov, V. K. Tyugai, P. K. Khabibulaev, et al., Zh. Fiz. Khim. 61, 3065 (1987).

    Google Scholar 

  2. A. M. Chaplanov and A. N. Shibko, Izv. Akad. Nauk SSSR, Ser. Fiz. 53, 1111 (1989).

    Google Scholar 

  3. W. Ian and I. W. Boyd, Appl. Surf. Sci. 109–110, 538 (1997).

    Google Scholar 

  4. I. Y. Zhand and I. W. Boyd, Appl. Phys. Lett. 71, 2964 (1997).

    ADS  Google Scholar 

  5. I. S. Nuprienok and A. N. Shibko, Zh. Tekh. Fiz. 71(9), 45 (2001) [Tech. Phys. 46, 1112 (2001)].

    Google Scholar 

  6. Handbook of Thin Technology, Ed. by L. I. Maissel and R. Glang (McGraw-Hill, New York, 1970; Sovetskoe Radio, Moscow, 1977), Vol. 1.

    Google Scholar 

  7. E. H. Rhoderick, Metal-Semiconductor Contacts (Clarendon, Oxford, 1978; Radio i Svyaz’, Moscow, 1982).

    Google Scholar 

  8. S. S. Kiparisov and Yu. V. Levitskii, Nitridation of Refractory Metals (Metallurgiya, Moscow, 1972).

    Google Scholar 

  9. H. Sumi, H. Inoue, and Y. Sugano, Jpn. J. Appl. Phys., Part 1 36, 595 (1997).

    Google Scholar 

  10. H. Kheyrandish, J. S. Colligan, and J. K. Kim, J. Vac. Sci. Technol. A 12, 2723 (1994).

    Article  ADS  Google Scholar 

  11. R. A. Andrievskii, G. M. Vol’dman, and M. A. Leont’ev, Izv. Akad. Nauk SSSR, Neorg. Mater. 27, 729 (1991).

    Google Scholar 

  12. M. D. Lyutaya, Production, Properties, and Application of Nitrides (Kiev, 1972), pp. 6–13.

  13. A. M. Chaplanov and A. N. Shibko, Neorg. Mater. 29, 1477 (1993).

    Google Scholar 

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Authors and Affiliations

  1. El’ton Research and Industrial Commercial Enterprise, Minsk, 220012, Belarus

    I. S. Nuprienok & A. N. Shibko

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  1. I. S. Nuprienok
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  2. A. N. Shibko
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Translated from Zhurnal Tekhnichesko\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l}\) Fiziki, Vol. 73, No. 2, 2003, pp. 125–128.

Original Russian Text Copyright © 2003 by Nuprienok, Shibko

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Nuprienok, I.S., Shibko, A.N. Influence of laser irradiation with hν=1.96 eV on the properties of titanium-silicon contact under thermal annealing in nitrogen. Tech. Phys. 48, 257–260 (2003). https://doi.org/10.1134/1.1553570

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  • DOI: https://doi.org/10.1134/1.1553570

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