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Chemical purity of diamond-like films produced by ion-beam deposition

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Abstract

Secondary-ion mass spectrometry is applied to determine the elemental composition of thin diamond-like films produced on silicon substrates by high-vacuum deposition from ion beams. Qualitative analysis and comparison of the results with the data gained for graphite and pyrocarbon standard samples indicate a high chemical purity for the diamond-like coatings obtained.

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Authors and Affiliations

  1. Institute of Molecular Crystal Physics, Ufa Scientific Center, Russian Academy of Sciences, pr. Oktyabrya 151, Ufa, 450054, Bashkortostan, Russia

    S. A. Pshenichnyuk

  2. Bashkortostan State University, ul. Frunze 32, Ufa, 450074, Bashkortostan, Russia

    Yu. M. Yumaguzin

Authors
  1. S. A. Pshenichnyuk
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  2. Yu. M. Yumaguzin
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Translated from Zhurnal Tekhnichesko\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \) Fiziki, Vol. 71, No. 10, 2001, pp. 99–103.

Original Russian Text Copyright © 2001 by Pshenichnyuk, Yumaguzin.

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Pshenichnyuk, S.A., Yumaguzin, Y.M. Chemical purity of diamond-like films produced by ion-beam deposition. Tech. Phys. 46, 1303–1306 (2001). https://doi.org/10.1134/1.1412068

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  • DOI: https://doi.org/10.1134/1.1412068

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