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The cluster charge and size distribution during ion sputtering of metals

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Abstract

The process of elastic sputtering of a metal in the form of large neutral and charged clusters (with the number of atoms N≥5) during ion bombardment of the metal target was theoretically studied. The distribution is described by a simple analytical formula.

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Authors and Affiliations

  1. Pomorskii State University, Arkhangelsk, Russia

    V. I. Matveev

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  1. V. I. Matveev
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__________

Translated from Pis’ma v Zhurnal Tekhnichesko\(j_k \sim 1/\sqrt[4]{\tau }\) Fiziki, Vol. 27, No. 18, 2001, pp. 14–21.

Original Russian Text Copyright © 2001 by Matveev.

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Matveev, V.I. The cluster charge and size distribution during ion sputtering of metals. Tech. Phys. Lett. 27, 761–764 (2001). https://doi.org/10.1134/1.1407352

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  • DOI: https://doi.org/10.1134/1.1407352

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