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Modification of the tip shape of a scanning probe microscope using ion sputtering

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Abstract

The process of ion sputtering of the tip of a scanning probe microscope is modeled to determine the conditions for the formation of protrusions at the apex of the tip. It is shown that for an isotropic sputtering process sharper protrusions form at the apex of a conical tip if the initial radius of curvature of the tip is not too large and the angular dependence of the sputtering coefficient has a fairly sharp peak at angles of incidence of 60–70°.

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Authors and Affiliations

  1. Kabardino-Balkar State University, Nalchik

    G. V. Dedkov & S. Sh. Rekhviashvili

Authors
  1. G. V. Dedkov
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  2. S. Sh. Rekhviashvili
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Pis’ma Zh. Tekh. Fiz. 25, 61–67 (January 26, 1999)

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Dedkov, G.V., Rekhviashvili, S.S. Modification of the tip shape of a scanning probe microscope using ion sputtering. Tech. Phys. Lett. 25, 67–69 (1999). https://doi.org/10.1134/1.1262370

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  • DOI: https://doi.org/10.1134/1.1262370

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