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Control of ion beams by surface ion-acoustic wave fields

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Abstract

It is shown for the first time that surface ion-acoustic waves may be used for polishing, etching, and depositing coatings. The proposed method of treatment is simple and convenient since the apparatus required is not cumbersome and is easy to fabricate. Compared with conventional ion beams, the proposed method of surface treatment can deliver high particle currents at the surface, which should enhance the efficiency of the material treatment. In addition, the excited surface ion-acoustic waves are natural waves, which reduces the energy consumption.

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Authors and Affiliations

  1. Kharkov

    N. A. Azarenkov, A. A. Bizyukov, A. V. Gapon & I. B. Denisenko

Authors
  1. N. A. Azarenkov
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  2. A. A. Bizyukov
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  3. A. V. Gapon
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  4. I. B. Denisenko
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Additional information

Pis’ma Zh. Tekh. Fiz. 24, 6–11 (February 12, 1998)

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Azarenkov, N.A., Bizyukov, A.A., Gapon, A.V. et al. Control of ion beams by surface ion-acoustic wave fields. Tech. Phys. Lett. 24, 83–85 (1998). https://doi.org/10.1134/1.1262005

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  • DOI: https://doi.org/10.1134/1.1262005

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