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Influence of the initial state of adatoms on the ratio of atoms and ions in a sputtered particle flow

  • Surfaces, Electron and Ion Emission
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Abstract

The role of the initial state of adatoms in the formation of the charge composition of a sputtered particle flow is investigated. Calculations are carried out for alkali metal atoms adsorbed on a tungsten surface and subjected to mutual dipole-dipole repulsion. It is shown that the escape probability (yield) of positive ions diminishes as the surface density of adatoms increases, an effect that is enhanced when the initial state ofthe adatoms is taken into account.

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Authors and Affiliations

  1. A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia

    S. Yu. Davydov

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  1. S. Yu. Davydov
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Zh. Tekh. Fiz. 69, 116–120 (May 1999)

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Davydov, S.Y. Influence of the initial state of adatoms on the ratio of atoms and ions in a sputtered particle flow. Tech. Phys. 44, 584–587 (1999). https://doi.org/10.1134/1.1259388

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  • DOI: https://doi.org/10.1134/1.1259388

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