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Ion-induced sputtering of a metal in the form of large clusters

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Abstract

A model is proposed for the ion-induced sputtering of a metal in the form of large clusters with a number of atoms N⩾5. The model is based on simple physical assumptions and is consistent with experiment. As an example, calculations are made of the relative cluster yield as a function of the number of atoms in the cluster as a result of the bombardment of various metals by singly charged 5 keV argon ions. A comparison is made with experimental data.

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Authors and Affiliations

  1. Department of Thermal Physics, Uzbekistan Academy of Sciences, 700135, Tashkent, Uzbekistan

    V. I. Matveev

  2. Institute of Electronics, Academy of Sciences of the Republic of Uzbekistan, 700143, Tashkent, Uzbekistan

    S. F. Belykh & I. V. Berevkin

Authors
  1. V. I. Matveev
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  2. S. F. Belykh
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  3. I. V. Berevkin
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Additional information

Zh. Tekh. Fiz. 69, 64–68 (March 1999)

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Matveev, V.I., Belykh, S.F. & Berevkin, I.V. Ion-induced sputtering of a metal in the form of large clusters. Tech. Phys. 44, 323–327 (1999). https://doi.org/10.1134/1.1259331

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  • DOI: https://doi.org/10.1134/1.1259331

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