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Radiation hardness of porous silicon

  • Amorphous, Glassy, and Porous Semiconductors
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Abstract

The effect of irradiation by 300-keV Ar+ ions on the properties of electrochemically produced porous silicon is studied at doses of 5×1014–1×1016 cm−2. Raman scattering and photoluminescence data are used to show that the radiation hardness of porous silicon layers is substantially greater than that of single crystal silicon.

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Fiz. Tekh. Poluprovodn. 31, 1126–1129 (September 1997)

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Ushakov, V.V., Dravin, V.A., Mel’nik, N.N. et al. Radiation hardness of porous silicon. Semiconductors 31, 966–969 (1997). https://doi.org/10.1134/1.1187143

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  • DOI: https://doi.org/10.1134/1.1187143

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