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Investigation of the compositional changes of a Y-Ba-Cu-O HTSC target under ion sputtering

  • Metals and Superconductors
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Abstract

An Auger electron spectroscopy study is reported of the elemental depth profile of Y-Ba-Cu-O HTSC targets subjected to ion-plasma sputtering in a magnetron deposition system and ion-beam sputtering in the Auger spectrometer chamber. It has been established that the process consists in all cases of predominant copper sputtering accompanied by the formation of a modified surface layer and of a copper-depleted region. This region is assumed to originate from intense copper diffusion from the bulk to the modified surface layer driven by a concentration gradient.

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Authors and Affiliations

  1. Institute of the Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod, 603600, Russia

    A. K. Vorob’ev, S. V. Gaponov, M. N. Drozdov, E. B. Klyuenkov & D. V. Masterov

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  1. A. K. Vorob’ev
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  2. S. V. Gaponov
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  3. M. N. Drozdov
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  4. E. B. Klyuenkov
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  5. D. V. Masterov
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__________

Translated from Fizika Tverdogo Tela, Vol. 42, No. 4, 2000, pp. 589–594.

Original Russian Text Copyright © 2000 by Vorob’ev, Gaponov, Drozdov, Klyuenkov, Masterov.

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Vorob’ev, A.K., Gaponov, S.V., Drozdov, M.N. et al. Investigation of the compositional changes of a Y-Ba-Cu-O HTSC target under ion sputtering. Phys. Solid State 42, 603–608 (2000). https://doi.org/10.1134/1.1131256

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  • DOI: https://doi.org/10.1134/1.1131256

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