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Structure and physicomechanical properties of nanocrystalline boride-nitride films

  • Low-Dimensional Systems and Surface Physics
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Abstract

Results are presented from an electron-microscopy study and x-ray structural analysis of nanocrystalline films based on titanium boride, obtained by rf and dc magnetron sputtering. The composition and formulas of the films are determined by Auger analysis. The hardness and elastic and electrical properties of the films are investigated. The role of size effects and deviations from stoichiometry (structural vacancies) is discussed.

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Authors and Affiliations

  1. Institute of New Chemical Problems, Russian Academy of Sciences, 142432, Chernogolovka, Moscow District, Russia

    R. A. Andrievskii & G. V. Kalinnikov

  2. Institute of Solid State Physics, Russian Academy of Sciences, 142432, Chernogolovka, Moscow District, Russia

    N. P. Kobelev & Ya. M. Soifer

  3. TsNIICherMet Russian Science Center, 107005, Moscow, Russia

    D. V. Shtanskii

Authors
  1. R. A. Andrievskii
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  2. G. V. Kalinnikov
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  3. N. P. Kobelev
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  4. Ya. M. Soifer
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  5. D. V. Shtanskii
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Fiz. Tverd. Tela (St. Petersburg) 39, 1859–1864 (October 1997)

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Andrievskii, R.A., Kalinnikov, G.V., Kobelev, N.P. et al. Structure and physicomechanical properties of nanocrystalline boride-nitride films. Phys. Solid State 39, 1661–1666 (1997). https://doi.org/10.1134/1.1129885

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  • DOI: https://doi.org/10.1134/1.1129885

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