A nanolithography technique that uses a heated scanning probe tip can precisely pattern metal electrodes on two-dimensional semiconductors, creating field-effect transistors with exceptional performance.
References
Salaita, K., Wang, Y. & Mirkin, C. A. Nat. Nanotech. 2, 145–155 (2007).
Zheng, X. et al. Nat. Electron. https://doi.org/10.1038/s41928-018-0191-0 (2019).
Allain, A., Kang, J., Banerjee, K. & Kis, A. Nat. Mater. 14, 1195–1205 (2015).
English, C. D. et al. Nano Lett. 16, 3824–3830 (2016).
Wang, L. et al. Science 342, 614–617 (2013).
Kappera, R. et al. Nat. Mater. 13, 1128 (2014).
Yu, Y. et al. Nat. Chem. 10, 638–643 (2018).
Liu, Y. et al. Nano Lett. 15, 3030–3034 (2015).
Cui, X. et al. Nano Lett. 17, 4781–4786 (2017).
He, Q. et al. ACS Nano 11, 4381–4386 (2017).
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
He, Q., Zhang, H. Nanoscale patterning hots up. Nat Electron 2, 13–14 (2019). https://doi.org/10.1038/s41928-018-0197-7
Published:
Issue Date:
DOI: https://doi.org/10.1038/s41928-018-0197-7
- Springer Nature Limited