Abstract
Gold nanofilms deposited by the method of magnetron sputtering are studied. The hardness of the nanofilms is determined by indentation. A method for correcting the results in the case of distortion of the film shape in the region of the indent is suggested. Laws of variation of the hardness of nanofilms are determined as a function of the their thickness and the material of the substrate.
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Bykov, Y.A., Karpukhin, S.D. & Cheptsov, V.O. Hardness of Nanofilm Gold Coatings on Substrates from Nb, Ni, Fe, and W. Metal Science and Heat Treatment 46, 240–243 (2004). https://doi.org/10.1023/B:MSAT.0000043110.14203.86
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DOI: https://doi.org/10.1023/B:MSAT.0000043110.14203.86