Abstract
A universal fiber-optic spectroscope has been developed that allows one to study state-of-the-art semiconductor structures by various methods employing the modulated reflection of light. Among these are both the well-known traditional methods of photoreflection and electroreflection and the new methods of longitudinal current modulated reflection and below-bandgap photoreflection. The possibilities of the spectroscope are demonstrated by studies of the semiconductor structures used to manufacture high electron mobility transistors and high-power semiconductor lasers.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
REFERENCES
Yu, P.Y. and Cardona, M., Fundamentals of Semiconduc-tors, Berlin: Springer, 2002.
Aspnes, D.E., Handbook on Semiconductors, Amster-dam: North-Holland, 1980, vol. 2.
Klar, P.J., Townsley, C.M., Wolverson, D., et al., Semi-cond. Sci. Technol., 1995, vol. 10, p. 1568.
Ryabushkin, O.A., Chernikov, M.A., Volkov, A.O., and Sotnikov, A.E., Abstracts of Papers, 26th Inter. Conf. on the Physics of Semiconductors, Inst. Phys. Conf. Ser., no. 171, p. D79, Edinburgh, UK, 2002.
Ryabushkin, O.A. and Sablikov, V.A., Pis'ma Zh. Eksp. Teor. Fiz., 1998, vol. 67, no. 3, p. 217 [JETP Lett. (Engl. Transl.), 1998, vol. 67, no. 3, p. 233].
Ryabushkin, O.A. and Lonskaya, E.I., Physica E, 2002, vol. 13, p. 374.
Bonch-Bruevich, V.L. and Kalashnikov, S.G., Fizika poluprovodnikov (Physics of Semiconductors), Mos-cow: Nauka, 1990.
Glembocki, O.J. and Shanabrook, B.V., Semicond. Semi-met., 1992, vol. 36, p. 221.
Nahory, R.E. and Shay, J.L., Phys. Rev. Lett., 1968, vol. 21, p. 1569.
Shen, H. and Dutta, M., J. Appl. Phys., 1995, vol. 78, no. 4, p. 2151.
Lu, N.H. and Hsu, T.M., Phys. Rev. B, 1995, vol. 52, p. 8191.
Yin, X. and Pollak, F.H., Appl. Phys. Lett., 1991, vol. 59, no. 18, p. 2305.
Volkov, A.O., Ryabushkin, O.A., and Povolotskii, M.S., Pis'ma Zh. Tekh. Fiz., 2001, vol. 27, no. 18, p. 8 [Tech. Phys. Lett. (Engl. Transl.), 2001, vol. 27, no. 18, p. 758].
Sudo, S., Optical Fiber Amplifiers: Materials, Devices, and Applications, Boston: Artech House Inc., 1977.
Chernikov, M.A., Sotnikov, A.E., Ryabushkin, O.A., et al., Abstracts of Papers, CLEO-Europe-2003, Munich, Germany, 2003, p. CC4M.
Ryabushkin, O.A., Romanyuk, A.Y., Chernikov, M.A., et al., Abstracts of Papers, CLEO-2003, Baltimore, USA, 2003, p. 35.
Shur, M., GaAs Devices and Circuits, New York: Ple-num, 1987. Translated under the title Sovremennye pri-bory na osnove arsenida galliya, Moscow: Mir, 1991.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Sotnikov, A.E., Chernikov, M.A. & Ryabushkin, O.A. A Universal Fiber-Optic Spectroscope for Studying the Modulated Reflection of Semiconductor Structures. Instruments and Experimental Techniques 47, 656–661 (2004). https://doi.org/10.1023/B:INET.0000043875.03173.d7
Issue Date:
DOI: https://doi.org/10.1023/B:INET.0000043875.03173.d7