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A Wide-Aperture Metal-Ion Source without Forced Cooling

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Abstract

The design of a small-sized source of metal ions (implanter) for experimental and technological applications is described. Smaller overall dimensions and a significantly simplified design are obtained through the use of an original cathode unit capable of operating without forced cooling.

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REFERENCES

  1. Bazhenov, G. P., Bugaev, S. P., Erokhin, G. P., et al., Dokl. Akad. Nauk SSSR, 1986, vol. 286, no. 4, p. 872.

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Authors and Affiliations

  1. Institute of High-Current Electronics, Siberian Division, Russian Academy of Sciences, Akademicheskii pr. 4, Tomsk, 634055, Russia

    O. B. Ladyzhenskii, R. M. Rasputin & A. V. Yanchuk

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  1. O. B. Ladyzhenskii
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  2. R. M. Rasputin
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  3. A. V. Yanchuk
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Ladyzhenskii, O.B., Rasputin, R.M. & Yanchuk, A.V. A Wide-Aperture Metal-Ion Source without Forced Cooling. Instruments and Experimental Techniques 43, 836–838 (2000). https://doi.org/10.1023/A:1026600824541

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  • DOI: https://doi.org/10.1023/A:1026600824541

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