Abstract
Ti films prepared by ionized physical vapor deposition (I-PVD) and TiN films prepared by metalorganic chemical vapor deposition (MOCVD) were examined as the underlayers of the Al interconnect films. The crystallographic texture of the Al films and the sheet resistance of the thin-film stacks were investigated at various thicknesses of the Ti or TiN thin film. The sheet resistance of the thin-film stacks was also measured after annealing at 400 °C in an N2 ambient. For the I-PVD Ti underlayer, the excellent texture of the Al (1 1 1) was obtained even on a 5-nm thick Ti film. However, the sheet resistance of the multilayer structure increased after the annealing due to the reaction between Al and Ti. MOCVD TiN layers between the Ti film and the Al film could suppress the Al–Ti reaction without severe degradation of the Al (1 1 1) texture. Excellent texture of the Al film was obtained with thin MOCVD TiN films below 5 nm.
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D. P. Tracy, D. B. Knorr and K. P. Rodbell, J. Appl. Phys. 76 (1994) 2671.
J. M. E. Harper and K. P. Rodbell, J. Vac. Sci. Technol. B 15 (1997) 763.
D. B. Knorr, S. M. Merchant and M. A. Biberger, ibid. 16 (1998) 2734.
D. B. Knorr, Mater. Res. Soc. Symp. Proc. 309 (1993) 75.
S. Vaidya and A. K. Sinha, Thin Solid Films 75 (1981) 253.
D. B. Knorr, D. P. Tracy and K. P. Rodbell, Appl. Phys. Lett. 59 (1991) 3241.
D. B. Knorr and K. P. Rodbell, J. Appl. Phys. 79 (1996) 2409.
J. L. Hurd, K. P. Rodbell, D. B. Knorr and N. L. Koligman, Mater. Res. Soc. Symp. Proc. 343 (1994) 653.
W. C. Shih, A. Ghiti, K. S. Low, A. L. Greer, A. G. O'Neill and J. F. Walker, ibid. 428 (1996) 249.
K. Hashimoto, K. Touchi and H. Onoda, in 1994 IEEE International Reliability Physics Proceedings, San Jose, USA, April 1994 (IEEE, New York, USA, 1994) p. 185.
E. M. Atakov, J. Ling, J. Maziarz, A. Shepela, B. Miner, C. England, W. Harris and D. Dunnell, in 1995 IEEE International Reliability Physics Proceedings, Las Vegas, USA, April 1995 (IEEE, New York, USA, 1995) p. 342.
L. M. Gignac, K. P. Rodbell, L. A. Clevenger, R. C. Iggulden, R. F. Schnabel, S. J. Weber, C. Lavoie, C. Cabral, Jr., P. W. Dehaven, Y.-Y. Wang and S. H. Boettcher, in “Advanced Metallization and Interconnect Systems for ULSI Applications in 1997”, San Diego, USA, September 1997, edited by R. Cheung, J. Klein, K. Tsubouchi, M. Murakami and N. Kobayashi (Materials Research Society, Warrendale, USA, 1998) p. 79.
R. W. Bower, Appl. Phys. Lett. 23 (1973) 99.
J. Tardy and K. N. Tu, Phys. Rev. B 32 (1983) 2070.
I. Krafcsik, J. Gyulai, C. J. Palmstrom and J. W. Mayer, Appl. Phys. Lett. 43 (1983) 1015.
K.-Y. Fu, H. Kawasaki, J. O. Olowolafe and R. E. Pyle, Proc. SPIE 1805 (1993) 263.
M. Kageyama, K. Hashimoto and H. Onoda, in Reliability Physics 1991: 29th Annual Proceedings, Las Vegas, USA, April 1991 (IEEE, New York, USA, 1991) p. 97.
K. Hinode and Y. Homma, in Reliability Physics 1990: 28th Annual Proceedings, New Orleans, USA, March 1990 (IEEE, New York, USA, 1990), p. 25.
M. Wittmer, J. Appl. Phys. 53 (1982) 1007.
I. Suni, M. Bloomber and J. Saarilahti, J. Vac. Sci. Technol. A 3 (1985) 2233.
S. M. Rossnagel, J. Vac. Sci. Technol. B 16 (1998) 2585.
A. J. Konecni, G. A. Dixit, J. D. Luttmer and R. H. Havemann, in Proceedings of the Thirteenth International VLSI Multilevel Interconnection Conference, Santa Clara, USA, June 1996 (VMIC, Tampa, USA, 1996) p. 181.
W.-J. Lee, B. Y. Kim, S. Y. Han, J. W. Lee, J. K. Kim and J. W. Park, Jpn. J. Appl. Phys. 39 (2000) 1694.
K. P. Rodbell, D. B. Knorr and D. P. Tracy, Mater. Res. Soc. Symp. Proc. 265 (1992) 107.
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Lee, WJ., Kim, SJ., Lee, W. et al. Texture and sheet resistance of Al alloy thin films on Ti and TiN thin films. Journal of Materials Science: Materials in Electronics 15, 9–13 (2004). https://doi.org/10.1023/A:1026272417002
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DOI: https://doi.org/10.1023/A:1026272417002