Abstract
The results of the development and optimization of the characteristics of an electric-discharge excimer–halogen light source based on argon, xenon, and chlorine mixtures (P ≤ 500 Pa) are presented. The wide-band source has a planar working aperture (S ≤ 100 cm2) and operates on a system of overlapping ArCl*, XeCl*, Cl* 2, and Cl** 2 molecular bands in the spectral range of 170–450 nm. The average power of the UV radiation is 15–50 W, and the efficiency of the lamp operation is 5–15%.
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Shuaibov, A.K., Shevera, I.V., Shimon, L.L. et al. A Planar Light Source Pumped by a Transverse High-Frequency Discharge. Instruments and Experimental Techniques 46, 690–693 (2003). https://doi.org/10.1023/A:1026006225139
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DOI: https://doi.org/10.1023/A:1026006225139