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Role of Carbon in the Electric Forming of Metal–Dielectric–Metal Systems

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Abstract

Thin-film Mo–SiO2 + C–Al systems are investigated. It is demonstrated that the electrical properties of these systems depend strongly on the percentage of carbon in a composite Si + C target at the stage of preparing the dielectric. The results obtained are interpreted in the context of the chemical interaction of carbon with silicon dioxide.

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Authors and Affiliations

  1. Tomsk State University of Control Systems and Radio Electronics, Russia

    P. E. Troyan, A. A. Zhigal'skii & Yu. V. Sakharov

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  1. P. E. Troyan
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  2. A. A. Zhigal'skii
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  3. Yu. V. Sakharov
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Troyan, P.E., Zhigal'skii, A.A. & Sakharov, Y.V. Role of Carbon in the Electric Forming of Metal–Dielectric–Metal Systems. Russian Physics Journal 46, 145–148 (2003). https://doi.org/10.1023/A:1024637811468

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  • DOI: https://doi.org/10.1023/A:1024637811468

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