Abstract
The ability to achieve and maintain high yield levels is directly dependent on the capability to detect and analyze repetitive failure mechanisms. In this paper, an advanced statistical diagnosis method, using the final wafer test results, is presented. The new method builds on an existing full diagnosis method, and studies the adaptations needed to turn it into an effective and efficient on-line statistical diagnosis approach. The output of the new approach is a (limited) list of suspect locations, which acts as input for further statistical and physical analysis. The experiments performed show the efficiency as well as the limitations of the proposed approach.
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Hora, C., Segers, R., Eichenberger, S. et al. On a Statistical Fault Diagnosis Approach Enabling Fast Yield Ramp-Up. Journal of Electronic Testing 19, 369–376 (2003). https://doi.org/10.1023/A:1024636424035
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DOI: https://doi.org/10.1023/A:1024636424035