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Tape casting of AlN/glass composites for LTCC substrate

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Abstract

AlN/glass composite is low-fired substrate material for microelectronic packaging material. In this work, AlN/glass sheets were prepared by tape casting process. The dispersion, stabilization and the rheological properties of the slurry were studied. The optimum drying condition and mechanisms of debinding were also investigated. The results showed that powder size influenced the optimum content of dispersant and the viscosity of slurry. The slurry for tape casting exhibited a typical shear-thinning behavior. Smooth green tape without cracking was acquired after it was dried at solvent atmosphere. The binder was fully burned out at 600°C at low heating speed. The lamination with uniform microstructure was achieved by hot-pressed at 900°C.

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References

  1. W. A. Vitriol and J. I. Steinberg, Int. J. hybrid Microelectron. 6 (1983) 593.

    Google Scholar 

  2. Yuzo Shimada, Kazuaki Utsumi, M. Suauki, Hideo Takamizawa, Mitsuru Nitta and Toshihiko Watari, IEEE. Tran. Comp. Hybrid Manu. CHMT-6 (1983) 382.

    Google Scholar 

  3. Yuzo Shimada, Yoshinibu Kobayshi, Keiichiro Kata, Masayuki Kurano and Hideo Takamizawa, ibid. 13 (1990) 751.

    Google Scholar 

  4. Rao R. Tummala and S. Ahmed, ibid. 15 (1992) 426.

    Google Scholar 

  5. Yuzo Shimada, Yoshiharu Yamashita and Hideo Takamizawa, ibid. 11 (1988) 163.

    Google Scholar 

  6. L. M. Sheppard, Amer. Ceram. Soc. Bull. 69 (1990) 1801.

    Google Scholar 

  7. T. Chartier, E. Streicher and P. Boch, J. Eur. Ceram. Soc. 9 (1992) 231.

    Google Scholar 

  8. Howard T. Sawhill, Ceram. Eng. Sci. Proc. 9 (1988) 1603.

    Google Scholar 

  9. Guillermo Terrones, P. A. Smith, T. R. Armstrong and T. J. soltersz, J. Amer. Ceram. Soc. 80 (1997) 3151.

    Google Scholar 

  10. D. J. Kim, M. H. Lee and C. E. Kim, ibid. 82 (1999) 3167.

    Google Scholar 

  11. R. E. Mistler, D. J. Shanefield and R. B. Runk, “Ceramics Processing Before Firing” (Wiley, New York, 1978) p. 411.

    Google Scholar 

  12. F. M. Fowkes, “Advance in Ceramics, Ceramic Powder Science,” Vol. 21 (American Ceramic Society, Westerville, OH, 1989) p. 411.

    Google Scholar 

  13. R. C. Chiu, T. J. Garino and M. J. Chima, J. Amer. Ceram. Soc. 76 (1993) 2257.

    Google Scholar 

  14. J. A. Lewis, K. A. Blackman, A. L. Ogden, J. A. Payne and L. F. Francis, ibid. 79 (1996) 3225.

    Google Scholar 

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Authors and Affiliations

  1. Chinese Academy of Sciences, Shanghai Institute of Ceramics, 1295 Ding Xi Road, Shanghai, 200050, People's Republic of China

    Qingxue Zhang, Xiaojun Luo, Wenlan Li, Hanrui Zhuang & Dongsheng Yan

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  1. Qingxue Zhang
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  2. Xiaojun Luo
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  3. Wenlan Li
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  4. Hanrui Zhuang
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  5. Dongsheng Yan
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Correspondence to Qingxue Zhang.

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Zhang, Q., Luo, X., Li, W. et al. Tape casting of AlN/glass composites for LTCC substrate. Journal of Materials Science 38, 1781–1785 (2003). https://doi.org/10.1023/A:1023292113547

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