Abstract
Results of investigations into the influence of multiple laser doping on the structure and properties of the layers formed are given. It is established that repeated treatment enables one to implement the processes of both “laser quenching” and “laser annealing.” The possibility of attaining a smooth gradient of the properties in the layer depth is shown.
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Devoino, O.G., Kardapolova, M.A., Dorozhkin, N.N. et al. Formation of the Structure of a Surface Layer in Multiple Laser Doping. Journal of Engineering Physics and Thermophysics 76, 116–120 (2003). https://doi.org/10.1023/A:1022927627392
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DOI: https://doi.org/10.1023/A:1022927627392