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Concentrations of Active Species in the Flowing Afterglow of a Nitrogen Microwave Plasma

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Abstract

Measurements of nitrogen atom density, by means of NO chemical titration, along with an evaluation of the densities of some excited species N 2 (B, v=11), N 2 (B, v=2), N 2 (C, v=0), and N +2 (B,v=0), by means of a spectroscopic study of some bands of dinitrogen, are achieved along the flowing afterglow of a dinitrogen microwave plasma (2450 MHz) for several pressures. The concentrations obtained are in the following range: [N]∼10 +15 , [N 2 (B, 2)]∼10 +9 –10 +10 , [N 2 (B, 11)]∼10 +8 –10 +9 , [N 2 (C, 0)]∼10 +6 –10 +7, [N +2 (B,0)]∼10 +6 -10 +8(cm-3). From a kinetic study of the formation and decay of excited and charged species, an estimation of N 2 (A, v), N 2 (X, v, and N +2 (X) densities can be derived: [N 2 (A, v)]∼10 +12 , [N 2 (X, v≥6)]∼10 +15 –10 +16 , [N 2 (X, v≥12)]∼10 +14 –10 +15, [N +2 (X)]∼10 +10 (cm -3).

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Authors and Affiliations

  1. Laboratoire de Chimie des Surfaces, CNRS URA 1428, Université Pierre et Marie Curie, Case 196, 4 place Jussieu, 75252, Paris Cedex 05, France

    A.-M. Diamy & J.-C. Legrand

  2. Laboratoire de Physique des Gaz et des Plasmas, CNRS URA 73, Université de Paris Sud, bât. 212, 91405, Orsay Cedex, France

    L. Hochard

  3. Centre Plasmas et Applications, CNRS ESA 5002, Université Paul Sabatier, 118 route de Narbonne, 31062, Toulouse Cedex, France

    A. Ricard

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  1. A.-M. Diamy
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  3. J.-C. Legrand
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  4. A. Ricard
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Diamy, AM., Hochard, L., Legrand, JC. et al. Concentrations of Active Species in the Flowing Afterglow of a Nitrogen Microwave Plasma. Plasma Chemistry and Plasma Processing 18, 447–460 (1998). https://doi.org/10.1023/A:1021855131761

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