Skip to main content
SpringerLink
Log in

A Plasma Stopper in a Hollow Cathode

  • Published:
Instruments and Experimental Techniques Aims and scope Submit manuscript

Abstract

A cap with a hole was mounted on the top of a cylindrical hollow cathode. The hole diameter ranged from 10 to 90% of the inner diameter of the hollow cathode. As a result, a plasma “stopper” was formed in the cathode cavity near the hole. The stopper hindered the plasma-forming gas flow from the cathode cavity into the vacuum chamber. This caused a pressure difference between the cathode cavity and the vacuum chamber. It was found that the pressure difference depended on the diameter of the hole in the cap. A cap with a hole of 4 mm in diameter mounted on the top of a hollow cathode with an inner diameter of 20 mm allowed a pressure difference of three orders of magnitude to be attained.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

REFERENCES

  1. Moskalev, B.I., Razryad s polym katodom (Discharge with a Hollow Cathode), Moscow: Energiya, 1969.

    Google Scholar 

  2. Sikharulidze, G.G., RU Patent 2174676 C1, 2001.

  3. Raizer, Yu.P., Fizika gazovogo razryada (Gas Discharge Physics), Moscow: Nauka, 1992.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Institute of Microelectronic Technology and Ultrahigh-Purity Materials, Russian Academy of Sciences, Chernogolovka, Moscow oblast, 142432, Russia

    G. G. Sikharulidze & A. E. Lezhnev

Authors
  1. G. G. Sikharulidze
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. E. Lezhnev
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Sikharulidze, G.G., Lezhnev, A.E. A Plasma Stopper in a Hollow Cathode. Instruments and Experimental Techniques 45, 840–842 (2002). https://doi.org/10.1023/A:1021455827717

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/A:1021455827717

Keywords

Search

Navigation