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Automation of Hand-Operated Ellipsometers

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Abstract

A phase-modulation attachment to hand-operated ellipsometers for their automation has been developed. An automated spectral ellipsometer with direct digital detection of the photodetector signal based on an L-119XUV (Gaertner) hand-operated ellipsometer was used in the contactless monitoring of thin inhomogeneous layers growing on the surfaces of metals and alloys. The accuracy of the instrument is about 0.05°, its spectral range is 0.35–0.8 μm, and the response speed is determined by the type of the spectrum analyzer, ADC, and computer employed.

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  1. Institute of Physical Chemistry, Russian Academy of Sciences, Leninskii pr. 31, Moscow, 117915, Russia

    V. A. Kotenev

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  1. V. A. Kotenev
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Kotenev, V.A. Automation of Hand-Operated Ellipsometers. Instruments and Experimental Techniques 45, 801–805 (2002). https://doi.org/10.1023/A:1021439324082

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  • DOI: https://doi.org/10.1023/A:1021439324082

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