Abstract
The synthesis of SiO2, Al2O3, BaO, PbO, B2O3, ZnO, and SiO2–Al2O3–BaO fine-particle powders was studied experimentally and optimized. The metal oxides, silicon, and an SiO2–Al2O3–BaO mixture were treated in an argon–oxygen or air high-frequency induction plasma, whereupon amorphous layers were deposited onto silicon substrates. Heat treatment of these layers at 1473 K for 15 min yielded continuous amorphous dielectric films with desired properties.
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Timoshenkov, S.P., Prokop'ev, E.P. & D'yachkov, S.A. Modeling and Optimization of the Synthesis of Fine-Particle Powders in High-Frequency Plasma. Theoretical Foundations of Chemical Engineering 36, 500–504 (2002). https://doi.org/10.1023/A:1020638215187
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DOI: https://doi.org/10.1023/A:1020638215187