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Spectroscopic ellipsometry studies of amorphous PZT thin films with various Zr/Ti stoichiometries

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Abstract

Amorphous stoichiometric Pb(Zr x Ti1 − x)O3) (PZT) thin films with various values of x were deposited on Si(100) substrates by the sol-gel technique. The influence of Ti content on the optical properties was studied by spectroscopic ellipsometry (SE) in the UV-visible region. Using a four-phase fitting model, the refractive index n and extinction coefficient k was obtained by analyzing the SE spectra. The optical band gap energies E g for these films were reported under the assumption of a direct band-to-band transition. It has been found that the refractive index, extinction coefficient and band gap energy of the films were functions of the film compositions. The refractive index of the PZT films increases linearly with increasing Ti content. On the other hand, the optical band gap energy of the PZT films decreases with increasing Ti content.

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Authors and Affiliations

  1. Department of Physics, Fudan University, Shanghai, 200433, People's Republic of China

    Shenghong Yang

  2. State Key Laboratory of Ultrafast Laser Spectroscopy and Department of Physics, Zhongshan University, Guangzhou, 510275, People's Republic of China

    Dang Mo

  3. Laboratory of Functional Inorganic Materials, Chinese Academy of Science, 1295, Ding Xi RD., Shanghai, 200050, People's Republic of China

    Xinggui Tang

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  1. Shenghong Yang
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  2. Dang Mo
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  3. Xinggui Tang
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Correspondence to Shenghong Yang.

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Yang, S., Mo, D. & Tang, X. Spectroscopic ellipsometry studies of amorphous PZT thin films with various Zr/Ti stoichiometries. Journal of Materials Science 37, 3841–3845 (2002). https://doi.org/10.1023/A:1019682817298

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