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Low-temperature growth of SnOx thin films using reactive ion-assisted deposition

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Division of Ceramics, Korea Institute of Science and Technology, PO Box 131, Cheongryang, Seoul, 130-650, South Korea

    J. S. Cho, S. K. Song, H.-J. Jung, S. K. Koh & W. K. Choi

  2. Department of Ceramic Engineering, Yonsei University, Sudaemoon-Gu, Shincheon-Dong, Seoul, 120-749, South Korea

    K. H. Yoon

Authors
  1. J. S. Cho
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  2. S. K. Song
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  3. H.-J. Jung
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  4. S. K. Koh
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  5. W. K. Choi
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  6. K. H. Yoon
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Cho, J.S., Song, S.K., Jung, HJ. et al. Low-temperature growth of SnOx thin films using reactive ion-assisted deposition. Journal of Materials Science Letters 16, 524–527 (1997). https://doi.org/10.1023/A:1018545217200

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