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A Low-Energy Gas-Discharge Open-End Ion Source without the External Magnetic Field

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Abstract

The described ion source, as oppose to the well-known Hall-type open-end ion source does not require an external magnetic field. The optimal operating parameters of the ion source (discharge voltage is 140 V, discharge current is 2.5 A, and operating pressure is <3.5 × 10–4Torr) allow one to obtain an argon ion beam with a current of up to 200 mA over an area with a diameter of up to 120 mm and beam current nonuniformity of <25%. This ion source has a long service life under high-temperature operating conditions.

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Authors and Affiliations

  1. Institute of Solid State and Semiconductor Physics, Belarussian Academy of Sciences, ul. Brovki 17, Minsk, 220072, Belarus

    A. I. Stognii

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  1. A. I. Stognii
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Stognii, A.I. A Low-Energy Gas-Discharge Open-End Ion Source without the External Magnetic Field. Instruments and Experimental Techniques 44, 271–274 (2001). https://doi.org/10.1023/A:1017547910752

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  • DOI: https://doi.org/10.1023/A:1017547910752

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