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Ultrasonic measurements of microelectronic molding compounds

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Abstract

We report ultrasonic measurements on commercial molding compounds used in the microelectronic industries. The elastic moduli of epoxy resins loaded with silica particles have been measured using ultrasonic wave propagation. Precise measurements of velocity propagation and attenuation were carried out in a large temperature (4–420 K) and frequency (1–100 MHz) ranges. The influence of frequency on the attenuation is discussed.

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Clément, A., Saint-Paul, M. Ultrasonic measurements of microelectronic molding compounds. Journal of Materials Science: Materials in Electronics 13, 21–25 (2002). https://doi.org/10.1023/A:1013190812644

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