Abstract
A model of an ion source based on a glow discharge in crossed fields for obtaining a drop-free stationary beam with a controlled Ti-to-N component ratio is described. A two-stage process of producing a gas–metal plasma takes place in a two-chamber device. The external ring-shaped chamber is the plasma source of a radially converging gas ion beam entering the internal chamber, in which metal vapors are produced by means of controllable sputtering of an isolated target electrode, and a gas–metal plasma is obtained for extraction of a mixed ion beam. A ion beam with an energy of 40 keV and a current of 6 mA at a Ti-to-N ratio of ∼0.8 is extrtacted. The model is designed for studying processes related to the obtainment of nonseparated beams of mixed composition and their use in technology.
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Potemkin, G.V., Kalmykov, V.F. A Universal Ion Source. Instruments and Experimental Techniques 44, 704–708 (2001). https://doi.org/10.1023/A:1012378414402
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DOI: https://doi.org/10.1023/A:1012378414402