Abstract
The necessity for the development of automatic interferometers with increased resolution is evaluated. One variant of a structural design is presented and the operational principle is described.
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Kolyada, Y.B., Korolev, Y.S., Razgulin, V.G. et al. Digital Photoelectric Interferometer for Measurement of Displacement. Measurement Techniques 44, 579–581 (2001). https://doi.org/10.1023/A:1012311128283
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DOI: https://doi.org/10.1023/A:1012311128283