Abstract
A geometric model of a scanning force microscope (atomic force microscope) (SFM) cantilever with micro- and nanostructures is considered. A linear gauge is proposed for SFM calibration and for definition of the SFM probe parameters. SEM and SFM methods of measuring submicrometer dimensions of relief structures are compared.
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Gornev, E.S., Novikov, Y.A., Plotnikov, Y.I. et al. Scanning Force Microscope Measurement of the Parameters of the Profiles of Submillimeter VLSI Components. Measurement Techniques 44, 44–48 (2001). https://doi.org/10.1023/A:1010968713323
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DOI: https://doi.org/10.1023/A:1010968713323