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Atomic force microscopy on surfaces with a developed profile

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Abstract

We propose a new operation mode for an atomic force microscope (vertical mode), which can be used to measure the topography and other physical parameters of a surface with deep pores, vertical walls, and significant height differences. The measurement of height in this mode is conducted upon vertical uniform motion of the probe towards the surface. Corresponding AFM images are presented.

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Authors and Affiliations

  1. Kotelnikov Institute of Radio Engineering and Electronics (Fryazino Branch), Russian Academy of Sciences, Fryazino, Moscow oblast, 141190, Russia

    A. G. Temiryazev & V. I. Borisov

  2. AIST-NT Ltd., Moscow, Zelenograd, 124460, Russia

    S. A. Saunin

Authors
  1. A. G. Temiryazev
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  2. V. I. Borisov
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  3. S. A. Saunin
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Corresponding author

Correspondence to A. G. Temiryazev.

Additional information

Original Russian Text © A.G. Temiryazev, V.I. Borisov, S.A. Saunin, 2014, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2014, No. 7, pp. 93–97.

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Temiryazev, A.G., Borisov, V.I. & Saunin, S.A. Atomic force microscopy on surfaces with a developed profile. J. Surf. Investig. 8, 708–711 (2014). https://doi.org/10.1134/S1027451014030161

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  • DOI: https://doi.org/10.1134/S1027451014030161

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