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Simultaneous determination of boron and carbon on silicon surfaceby deuteron activation analysis

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Abstract

Simultaneous determination of total boron and carbon on the surface of high-purity silicon plate was made possible by activation with the 10B(d,n)11C and 12C(d,n)13N reactions followed by chemical separation, in which the surface layer is dissolved in polyphosphoric acid containing I2O5 for the 11C and 13N to be volatilized into a helium stream and then trapped in Ascarite and titanium sponge columns, respectively. It takes about 20 minutes for the chemical separation. The detection limit is 1·1012 atoms/cm2 for both B and C. Some preliminary experiments were undertaken for utilizing this analysis to the monitoring of air pollution, with the silicon plate as a passive sampler.

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Reference

  1. National Technology Road Map for Semiconductors, 1997; Semiconductor Industry Association, San Jose, USA, 1997.

  2. S. Kataoka, Y. Tarumi, H. Yagi, S. Tomiyoshi, T. Nozaki, J. Radioanal. Nucl. Chem., 216 (1997) 217.

    Google Scholar 

  3. T. Nozaki, H. Yagi, H. Muraoka, A. Nagano, M. Kohno, Anal. Chem., 71 (1999) 3551.

    Google Scholar 

  4. Landoldt-BÖrnstein, Numerical Data and Functional Relationships in Science and Technology, New Series, Group 1, Vol. 13, Production of Radionuclides at Intermediate Energies, H. Shopper (Ed.), Springer, Berlin, Subvol. F, 1995, p. 46; 48; 265; 266.

    Google Scholar 

  5. R. W. Michelmann, J. Krauskopf, J. D. Meyer, K. Bethge, Nucl. Instr. Meth., B51 (1990) 1.

    Google Scholar 

  6. H. Fukushima, T. Kimura, H. Hamaguchi, T. Nozaki, Y. Itho, Y. Ohkubo, J. Radioanal. Nucl. Chem., 112 (1987) 415.

    Google Scholar 

  7. S. Kataoka, Y. Higaki, Y. Tarumi, S. Tazawa, S. Imai, T. Nozaki, J. Radioanal. Nucl. Chem., 168 (1993) 168.

    Google Scholar 

  8. K. Terada, T. Kiba, K. Suzuki, Talanta, 19 (1972) 451.

    Google Scholar 

  9. Ref. 4; Subvol. F, 1995, p. 368; 369; 468.

  10. Ref. 4; Subvol. A, 1991, p. 34; 275; Subvol. D, 1994, p. 47, 351; Subvol. I, 1999, p. 45.

  11. Ref. 4; Subvol. A, 1991, p. 23; 272; Subvol. D, 1994, p. 39; 814.

  12. G. E. McGuire, J. Fuchs, P. Han, J. G. Kushmerick, P. S. Weiss, S. J. Simko, R. J. Nemanich, D. R. Shopra, Anal. Chem., 71 (1999) 373R.

    Google Scholar 

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Authors and Affiliations

  1. S.H.I. Examination and Inspection Ltd, 1501 Imazaike, Toyo, Ehime, 799-1393, Japan

    A. Nagano & H. Yagi

  2. Purex Company, 735 Nippacho, Kohokuku, Yokohama, 223-0057, Japan

    T. Nozaki

Authors
  1. A. Nagano
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  2. H. Yagi
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  3. T. Nozaki
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Nagano, A., Yagi, H. & Nozaki, T. Simultaneous determination of boron and carbon on silicon surfaceby deuteron activation analysis. Journal of Radioanalytical and Nuclear Chemistry 248, 109–113 (2001). https://doi.org/10.1023/A:1010638427117

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