Skip to main content
Log in

Hollow Metallic Micromachined Needle Arrays

  • Published:
Biomedical Microdevices Aims and scope Submit manuscript

Abstract

In this paper, fluid coupled metallic micromachined needle arrays are designed, fabricated, packaged, and characterized. The described hollow metallic needle arrays include design features such as dual structural supports and needle coupling channels. The supports and needle walls are formed by micro-electroformed metal to provide increased structural integrity. The needle coupling channels are used to fluidically interconnect the needles and allow pressure equalization and balance of fluid flow between needles. In addition, the needle coupling channels minimize the effects of restricted needle passages by providing a redistribution point for fluid flow between them. The optimum design for the needle coupling channels is investigated using an ANSYS finite element numerical model. The significance of this work includes the development of hollow, metallic micromachined needle arrays for biomedical applications, as well as, a discussion of structural, fluidic, and biological design considerations

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. M. Boillat, B. Schoot, P. Arquint, and N. Rooij, “Controlled liquid dosing in micro-instruments,” in Proc SPIE Micro Fluidic Devices and Systems (Santa Clara, CA, 1999) Sep. 20–21, pp. 20-27.

  2. M.A. Burns, B.M. Johnson, S.N. Brahmasandra, K. Handique, J.R. Webster, M. Krishnan, T.S. Sammarco, P.F. Mann, D.K. Jones, D. Heldsinger, C.H. Mastrangelo, and D.T. Burke, Science 282, 484-487 (1998).

    Google Scholar 

  3. D.J. Harrison, C. Skinner, S.B. Cheng, G. Ocvirk, S. Attiya, N. Bings, C. Wang, J. Li, P. Thibault, and W. Lee, “From micromotors to micro-fluidics the blossoming of micromachining technologies in chemistry, biochemistry, and biology,” in Proc Transducers '99 (Sendai, Japan, 1999) June 7–10, pp. 12-15.

  4. J.W. Choi, S. Bhansali, C.H. Ahn, and H.T. Henderson, “A new magnetic bead-based filterless bio-separator for integrated biomolecule detection systems,” in Proc Eurosensors XIII (Netherlands, September, 1999).

  5. B.K. Gale, A.B. Frazier, and K. Caldwell, “A micromachined electrical field-flow fractionation (u-EFFF) system,” IEEE Trans Biomed Eng 45(12), 1459-1469 (1998).

    Google Scholar 

  6. J. Chen and K.D. Wise, “A multipchannels neural probe for selective chemical delivery at the cellular level,” in Tech Dig IEEE Solid-State Sensor and Actuator Workshop (Hilton Head, SC, 1994), June 13–16, pp. 256-259.

  7. L. Lin and A.P. Pisano, “Silicon-processed microneedles,” in IEEE J Microelectromech Sys 8(1), 78-84 (1999).

    Google Scholar 

  8. N.H. Talbot and A.P. Pisano, “Polymolding two wafer polysilicon micromolding of closed-flow passages for microneedles and microfluidic devices,” in Tech Dig Solid-State Sensor and Actuator Workshop (Hilton Head, SC, 1998), June 8–11, pp. 265-268.

  9. D.V. McAllister, F. Cros, S.P. Davis, L.M. Matta, M.R. Prausnitz, and M.G. Allen, “3-dimensional hollow microneedle and microtube arrays,” in Proc Transducers '99 (Sendai, Japan, 1999), June 7–10, pp. 1098-1101.

  10. United States Patent, Patent Number 5,876,582.

  11. John D. Brazzle, Ian Papautsky, and A.Bruno Frazier, “Fluid-coupled metallic microfabricated needle arrays,” in Proc SPIE Micro Fluidic Devices and Systems (Santa Clara, CA, 1998), Sep. 21–24, pp. 116-124.

  12. I. Paputsky, J. Brazzle, H. Swerdlow, and A.B. Frazier, “A low temperature, IC compatable process for fabricating surface micromachined metallic microchannels”, in IEEE J Microelectromech Sys 7(2), 267-273 (1998).

    Google Scholar 

  13. I. Paputsky, J. Brazzle, H. Swerdlow, and A.B. Frazier, “Micromachined pipette arrays,” in IEEE Engineering in Medicine and Biology Society Conf (Chicago, IL, 1997) Oct 30–Nov 2.

  14. H. Schlichting, Boundary Layer Theory 7th ed (McGraw-Hill, New York, NY, 1979).

    Google Scholar 

  15. F.M. White, Viscous Fluid Flow 2nd ed (McGraw Hill, New York, NY, 1991).

    Google Scholar 

  16. F.M. White, Fluid Mechanics 3rd ed (McGraw Hill, New York, NY 1994).

    Google Scholar 

  17. R.W. Fox and A.T. McDonald, Introduction to Fluid Mechanics 3rd ed (John Wiley and Sons, New York, NY, 1985).

    Google Scholar 

  18. R.L. Panton, Incompressible Flow 2nd ed (John Wiley and Sons, New York, NY, 1996).

    Google Scholar 

  19. D.J. Elliot, Integrated circuit fabrication technology (McGraw-Hill, New York, NY, 1982).

    Google Scholar 

  20. R.A. Colclaser, Microelectronics processing and device design (John Wiley & Sons, New York, NY, 1980).

    Google Scholar 

  21. H. Siedel, L. Csepregi, and A. Heuberger, “Anisotropic etching of crystalline silicon in alkaline solutions”, J Electrochem Soc 37, 3612-3620 (1990).

    Google Scholar 

  22. I. Kadija, V. Chinchankar, V.T. Eckert, E.J. Kudrak, and J. Abys, “Electroplating of thick and ductile palladium A new electroplating technology”, Proc of the 77th Annual Conference of the American Electroplaters and Surface Finishers Society July (1990).

  23. S.D. Cramer and D. Schlain, “Electrodeposition of palladium and platinum from aqueous electrolytes,” Plating May, 516-522 (1969).

  24. E.J. Kudrak, J.A. Abys, H.K. Straschil, I. Kadija, and J.J. Maisano, “Palladium and palladium alloy plating for the 90's,” presented at Connectors '93 (East Midlands, England, May 19, 1993).

  25. J. Black, Biological performance of materials Fundamentals of biocompatablity (Marcel Dekker, New York, NY, 1992).

    Google Scholar 

  26. W.H. Safranek, The Properties of Electrodeposited Metals and Alloys (Elsevier, New York, NY, 1974).

    Google Scholar 

  27. J.K. Dennis and T.E. Such, Nickel and Chromium Plating 3rd ed (Cambridge, U.K. Woodhead, 1993).

    Google Scholar 

  28. J.M. Gere and S.P. Timoshenko, Mechanics of Materials (PWS-Kent Publishing Company, Boston, 1990).

    Google Scholar 

  29. Ian Papautsky, John Brazzle, Timothy Ameel, and A.Bruno Frazier, “Laminar fluid behavior in microchannels using micropolar fluid theory,” Sensors and Actuators 73(2), 101-108 (1999).

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Brazzle, J.D., Papautsky, I. & Bruno Frazier, A. Hollow Metallic Micromachined Needle Arrays. Biomedical Microdevices 2, 197–205 (2000). https://doi.org/10.1023/A:1009980412628

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/A:1009980412628

Navigation