Abstract
The sol-gel reactions of methyl- and vinyltrimethoxysilane under controlled conditions provided the corresponding polysilsesquioxanes and flexible thin films on further condensation of the precursors. Silicon oxycarbides containing a large amount of free carbon 58 mol% and 90 mol% were obtained in high yields 90 wt% on pyrolyzing the precursors of polymethyl-and polyvinylsilsesquioxane at 1400°C under N2 atmosphere, respectively. Moreover, pyrolytic polycondensation of polyvinylsilsesquioxane was found to give the silicon oxycarbide ceramic films without deformations and cracks. The composition and properties of films were investigated.
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Takamura, N., Taguchi, K., Gunji, T. et al. Preparation of Silicon Oxycarbide Ceramic Films by Pyrolysis of Polymethyl- and Polyvinylsilsesquioxanes. Journal of Sol-Gel Science and Technology 16, 227–234 (1999). https://doi.org/10.1023/A:1008765103113
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DOI: https://doi.org/10.1023/A:1008765103113