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Fine Patterning of Transparent, Conductive SnO2 Thin Films by UV-Irradiation

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Abstract

Finely patterned transparent, conductive SnO2 thin films have been prepared. UV-light from a high-pressure mercury lamp was irradiated through a mask on the precursor films prepared from SnCl2 with acetyl acetone in the ambient atmosphere, and this irradiation led to the change of solubility of the films in alkaline solution. Patterns with a width of about 3 to 50 μm and thickness of about 0.1 μm were formed with a pitch of about 2 to 20 μm. The resistivity of the films heat-treated at 500°C after UV irradiation was about 1 × 10−2 Ω cm, which was almost the same resisitivity for the films heat-treated at 500°C without UV irradiation.

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References

  1. H. Krug, N. Merl, and Helmut Schmidt, J. Non-Cryst. Solids 147/148, 447 (1992).

    Google Scholar 

  2. A. Matsuda, Y. Matsuno, M. Tatsumisago, and T. Minami, J. Am. Ceram. Soc. 81, 2849 (1998).

    Google Scholar 

  3. N. Tohge, A. Matsuda, and T. Minami, J. Non-Cryst. Solids 100, 501 (1988).

    Google Scholar 

  4. A. Matsuda, Y. Matsuno, S. Kataoka, S. Katayama, T. Tsuno, N. Tohge, and T. Minami, Proc. SPIE (Sol-Gel Optics) 1328, 71 (1990).

    Google Scholar 

  5. K. Shinmou, N. Tohge, and T. Minami, Jpn. J. Appl. Phys. 33 (Part 2), L1181 (1994).

    Google Scholar 

  6. N. Tohge, K. Shimmou, and T. Minami, J. Sol-Gel Sci. Tech. 2, 581 (1994).

    Google Scholar 

  7. G. Zhao, N. Tohge, and J. Nishii, Jpn. J. Appl. Phys. 37 (Part 1), 1842 (1998).

    Google Scholar 

  8. T. Yogo, T. Takeichi, K. Kikuta, and S. Hirano, J. Am. Ceram. Soc. 78, 1649 (1995).

    Google Scholar 

  9. S. Ono and S. Hirano, J. Am. Ceram. Soc. 80, 2533 (1997).

    Google Scholar 

  10. G. Righini and S. Pelli, J. Sol-Gel Sci. Tech. 8, 991 (1997).

    Google Scholar 

  11. P.G. Clem, N.L. Jeon, R.G. Nuzzo, and D.A. Payne, J. Am. Ceram. Soc. 80, 2821 (1997).

    Google Scholar 

  12. M.A. Aegerter, A. Reich, D. Ganz, G. Gasparro, J. Putz, and T. Krajewski, J. Non-Cryst. Solids 218, 123 (1997).

    Google Scholar 

  13. T. Tamai, N. Ichinose, S. Kawanishi, M Nishii, T. Saegusa, I. Hashida, and K. Mizuno, Chem. Mater. 9, 2674 (1997).

    Google Scholar 

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Authors and Affiliations

  1. Department of Applied Materials Science, Graduate School of Engineering, Osaka Prefecture University, Sakai, Osaka, 599-8531, Japan

    Kiyoharu Tadanaga

  2. Department of Applied Materials Science, Graduate School of Engineering, Osaka Prefecture University, Sakai, Osaka, 599-8531, Japan

    Tomochika Owan, Junichi Morinaga, Sebastien Urbanek & Tsutomu Minami

Authors
  1. Kiyoharu Tadanaga
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  2. Tomochika Owan
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  3. Junichi Morinaga
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  4. Sebastien Urbanek
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  5. Tsutomu Minami
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Tadanaga, K., Owan, T., Morinaga, J. et al. Fine Patterning of Transparent, Conductive SnO2 Thin Films by UV-Irradiation. Journal of Sol-Gel Science and Technology 19, 791–794 (2000). https://doi.org/10.1023/A:1008764217509

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  • DOI: https://doi.org/10.1023/A:1008764217509

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