Abstract
Synthesis of ZrO2 and hetero-layered TiO2/ZrO2 ultrathin films was investigated by two-dimensional sol-gel process assisted by n-octadecylacetoacetate (C18AA). When a hexane solution of tetrabutoxyzirconium (TBZ) and C18AA was spread on the water surface, Zr-based gel films stabilized with C18AA were formed at the air/water interface. After deposition on substrates, the gel films were successfully transformed into ZrO2 ultrathin films by heating at 773 K for 0.5 h, the thickness of which was controllable on the order of sub-nanometer level by the number of gel-layer deposition and the molar ratio of [TBZ]/[C18AA]. Well-organized hetero-multilayers composed of ultrathin TiO2 and ZrO2 layers could be fabricated by the alternate deposition of C18AA-stabilized Ti- and Zr-gel films.
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Moriguchi, I., Tsujigo, Y., Teraoka, Y. et al. Two-Dimensional Sol-Gel Synthesis of Ultrathin Zirconia and Hetero-Layered Titania/Zirconia Films. Journal of Sol-Gel Science and Technology 19, 227–230 (2000). https://doi.org/10.1023/A:1008740406238
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DOI: https://doi.org/10.1023/A:1008740406238