Abstract
MgO thin films have been prepared on Si substrates by a novel and simple sol-gel method using magnesium nitrate and collodion as starting material. Solutions consisting of magnesium nitrate in a mixture of collodion and ethanol were spin-coated onto silicon substrates. It was found that collodion was a necessary component to form stable sols and the crystallization and structures were clearly dependent on the amount of the collodion and the annealing temperature. The MgO thin films with good crystallization were obtained after annealing at 800°C. Meanwhile, the microstructure of the MgO films was examined by transmission electron microscopy and atomic force microscopy.
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Fu, X., Song, Z., Wu, G. et al. Preparation and Characterization of MgO Thin Films by a Novel Sol-Gel Method. Journal of Sol-Gel Science and Technology 16, 277–281 (1999). https://doi.org/10.1023/A:1008725521769
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DOI: https://doi.org/10.1023/A:1008725521769