Abstract
The microstructure of alumina after Ti ion implantation has been investigated. A metal vapourvacuum arc (MEVVA) ion source was employed to implant Ti ions into alumina with doses of7.6 × 1016 and 3.1 × 1017 ions/cm2 at 40 kV. Scanning electronmicroscopy (SEM) of the irradiated surfaces revealed topographical changes, which were dependent ondose. The implanted layer was also characterised by Rutherford backscattering (RBS) andcross-sectional transmission electron microscopy (XTEM) which showed the lower Ti dose resulted in ahighly defective surface layer. In contrast, TiO2 precipitates in anamorphous matrix were observed at the higher dose.
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References
C. J. McHargue, Nucl. Instrum. Methods B19/20 (1994) 797.
J. S. Daniel, P. Martin, M. Dufour, A. Ermo-Lieff, S. Marthon, F. Pierre and M. Dupuy, 1993 IEEE International Frequency Control Symposium, 1993, p. 597.
H. Naramoto, C. J. McHargue, C. W. White, J. M. Williams, O. W. Holland, M. M. Abraham and B. R. Appleton, Nucl. Instrum. Methods B209/210 (1983) 1159.
C. J. McHargue, G. C. Farlow, C. W. White, J. M. Williams, P. Angelini and G. M. Begun, Mater. Sci. Eng. 69 (1985) 123.
F. Halitim, S. Paletto, G. Fantozzi and D. Tre-Heux, J. Eur. Ceramic Soc. 15 (1995) 833.
S. M. M. Ramos, B. Cannt, L. Gea, P. Thevenard, M. Bauer, Y. Maheo, P. Kapsa and J. L. Loubet, J. Mater. Res. 7 (1992) 178.
F. Halitim, N. Ikhlef, L. Boudoukha and G. Fan-Tozzi, J. Phys. D 30 (1997) 330.
I. G. Brown, J. E. Galvin, B. F. Gavin and R. A. MacGill, Rev. Sci. Instrum. 57 (1986) 1069.
R. Cornelius, M. Samandi and P. J. Evans, Surface Eng. 11 (1995) 123.
I. G. Brown and X. Godechot, IEEE Trans. Plasma Sci. 19 (1991) 713.
L. Doolittle, Nucl. Instrum. Methods B9 (1985) 334.
A. Rahioui and C. Esnouf, Surface & Coating Tech. 45 (1991) 23.
R. Kelly, in “Beam Modification of Materials 1,” edited by O. Auciello and R. Kelly (Elsevier, Netherlands, 1984) p. 79.
O. Auciello, R. Kelly and R. Iricibar, Rad. Effects 46 (1980) 105.
R. Kelly and N. Q. Lam, Rad Effects 10 (1971) 247.
P. D. Townsend, in “Materials and Processes for Surface and Interface Engineering,” edited by Y. Pauleau (Kluwer, Netherlands, 1995) p. 285.
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Ji, H., Evans, P.J. & Samandi, M. Microstructural characterisation of alumina with Ti ion implantation. Journal of Materials Science 35, 3681–3684 (2000). https://doi.org/10.1023/A:1004898521215
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DOI: https://doi.org/10.1023/A:1004898521215