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Oxidation of aluminium nitride

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Abstract

The oxidation kinetics of polycrystalline aluminium nitride substrates in air at temperatures in the range 1150 to 1750°C have been studied by measuring the weight increase in the oxidized samples. At the lowest temperature, the oxide layer was not continuous on the AlN surface and the oxidation kinetics followed a linear rate law with an activation energy of 175 kJ mol−1. At all the higher temperatures, the growth kinetics followed a parabolic rate law with an activation energy of 395 kJ mol−1. Samples oxidized at these higher temperatures were covered with a dense oxide layer having a fine-grained microstructure.

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References

  1. M. G. Norton, J. M. Kajda and B. C. H. Steele, J. Mater. Res. 5 (1990) 2172.

    Google Scholar 

  2. M. G. Norton, J. Mater. Sci. 26 (1991) 2322.

    Google Scholar 

  3. Idem, J. Mater. Sci. Lett. 9 (1990) 91.

    Google Scholar 

  4. M. G. Norton, B. C. H. Steele and C. A. Leach, in “Science of Ceramics” 14, edited by D. Taylor (The Institute of Ceramics, Stoke-on-Trent, 1988) p. 545.

    Google Scholar 

  5. M. G. Norton, T. K. A. Yang, P. G. Kotula, K. L. Rugg, S. McKernan and C. B. Carter, in “Electronic packaging materials science”, edited by E. D. Lillie, R. J. Jaccodine, P. Ho and K. Jackson, Materials Research Society Symposium Proceedings Vol. 203 (MRS, 1991) p. 241.

  6. A. D. Katnani and K. I. Papathomas, J. Vac. Sci. Technol. A 5 (1987) 1335.

    Google Scholar 

  7. T. Sato, K. Haryu, T. Endo and M. Shimada, J. Mater. Sci. 22 (1987) 2277.

    Google Scholar 

  8. D. Robinson and R. Dieckmann, ibid. 29 (1994) 1949.

    Google Scholar 

  9. A. Bellosi, E. Landi and A. Tam pieri, J. Mater. Res. 8 (1993) 565.

    Google Scholar 

  10. P. Boch, J. C. Glandus, J. Jarrige, P. Lecompte and J. Mexmain, Ceram. Int. 8 (1982) 34.

    Google Scholar 

  11. P. Lefort, G. Ado and M. Billy, J. Phys C47(1986) C1.

    Google Scholar 

  12. D. Suryanarayana, J. Amer. Ceram. Soc. 73 (1990) 1108.

    Google Scholar 

  13. S. McKernan, M. G. Norton and C. B. Carter, in “Electronic packaging materials science”, edited by E. D. Lillie, R. J. Jaccodine, P. Ho and K. Jackson. Materials Research Society Symposium Proceedings Vol. 203 (MRS, 1991) p. 229.

  14. W. D. Kingery, H. K. Bowen and D. A. Uhlmann, in “Introduction to ceramics” 2nd edition (John Wiley, New York, 1976) p. 239.

    Google Scholar 

  15. A. Atkinson, Solid State Ionics 12 (1984) 309.

    Google Scholar 

  16. A. Freer, J. Mater. Sci. 15 (1980) 803.

    Google Scholar 

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Authors and Affiliations

  1. School of Mechanical and Materials Engineering, Washington State University, Pullman, WA, 99164, USA

    E. W. Osborne & M. G. Norton

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  1. E. W. Osborne
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  2. M. G. Norton
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Correspondence to M. G. Norton.

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Osborne, E.W., Norton, M.G. Oxidation of aluminium nitride. Journal of Materials Science 33, 3859–3865 (1999). https://doi.org/10.1023/A:1004667906474

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