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Design of a Non-uniform Serpentine Asymmetric Cantilever RF-MEMS Shunt Capacitive Switch for RADAR Applications

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Abstract

This paper presents the design and simulation of Cantilever type RF-MEMS Capacitive shunt switch with meanders and perforations. The main objective of this paper is to reduce the pull-in voltage and increases isolation of the proposed switch. Electro-mechanics and Solid-mechanics are used to simulate the proposed switch by using COMSOL Multiphysics software. The capacitance, switching time, stress analysis are calculated and compare both theoretical and simulation results of the proposed switch. By varying different beam thickness, materials, an air gap between the beam and signal line to calculate spring constant and pull-in voltage. The proposed switch having pull-in voltage is 1.371 V, the dielectric material Si3N4 is to improve the capacitance analysis of the switch. The up and downstate capacitance is 7.073 fF, 1.259 pF. The RF performance is simulated by using Ansoft HFSS tool, the switch performs at low frequencies at 1–4 GHz range. The return (S11) and insertion loss (S12) of the proposed switch is − 30 dB, − 0.0516 dB and the switch having good isolation (S21) is − 37.5 dB at 1.5 GHz frequency. The switch is suitable for radar and satellite communication applications.

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References

  1. Z. Chen, W. Tian, X. Zhang, Effect of surface asperities on the capacitances of capacitive RF MEMS switches. J. Micromech. Microeng. 27, 034002 (2017)

    Article  Google Scholar 

  2. S. Molaei, B.A. Ganji, Design and simulation of a novel RF MEMS shunt capacitive switch with low actuation voltage and high isolation. Microsyst. Technol. 23, 1907–1912 (2017)

    Article  CAS  Google Scholar 

  3. Y. Liu, Y. Bey, X. Liu, High-power high-isolation RF-MEMS switches with enhanced hot-switching reliability using a shunt protection technique. IEEE Trans. Microw. Theory Tech. 65, 3188–3199 (2017)

    Article  Google Scholar 

  4. S. Molaei, B.A. Ganji, Design and simulation of a novel RF MEMS shunt capacitive switch with low actuation voltage and high isolation. Microsyst. Technol. 23(6), 1907–1912 (2017)

    Article  CAS  Google Scholar 

  5. A. Persano, F. Quaranta, G. Capoccia, E. Proietti, A. Lucibello, R. Marcelli, Influence of design and fabrication on RF performance of capacitive RF MEMS switches. Microsyst. Technol. 22, 1741–1746 (2016)

    Article  CAS  Google Scholar 

  6. S. Shekhar, K. Vinoy, G. Ananthasuresh. Design, fabrication and characterization of capacitive RF MEMS switches with low pull-in voltage, in 2014 IEEE International Microwave and RF Conference (IMaRC), pp. 182–185 (2014)

  7. A. Ziaei, S. Bansropun, P. Martins, M. Le Baillif. Fast high power capacitive RF-MEMS switch for X-Band applications, in 2015 45th European Solid State Device Research Conference (ESSDERC), IEEE, pp. 153–155 (2015)

  8. C.L. Goldsmith, Z. Yao, S. Eshelman, D. Denniston, Performance of low-loss RF MEMS capacitive switches. IEEE Microw. Guided Wave Lett. 8(8), 269–271 (1998)

    Article  Google Scholar 

  9. H. Jaafar, K.S. Beh, N.A.M. Yunus, W.Z.W. Hasan, S. Shae, O. Sidek, A comprehensive study on RF MEMS switch. Microsyst. Technol. 20, 2109–2121 (2014)

    Article  Google Scholar 

  10. Y. Mafinejad, M. Zarghami, A.Z. Kouzani, K. Mafinezhad, Design and simulation of a high isolation RF MEMS shunt capacitive switch for CK band. IEICE Electron. Express 10(24), 20130746 (2013)

    Article  Google Scholar 

  11. L. Narayana, T.K. GirijaSravani, K. SrinivasaRao, Design and analysis of CPW based shunt capacitive RF MEMS switch. Cogent. Eng. 4(1), 1363356 (2017)

    Google Scholar 

  12. T. Singh, Effective stress modeling of membranes made of gold and aluminum materials used in radio-frequency microelectromechanical system switches. Trans. Electr. Electron. Mater. 14(4), 172–176 (2013)

    Article  Google Scholar 

  13. D. Balaraman, S.K. Bhattacharya, F. Ayazi, J. Papapolymerou, Low-cost low actuation voltage copper RF MEMS switches, in 2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No. 02CH37278), vol. 2, IEEE, pp. 1225–1228 (2002)

  14. K.S. Rao, L.N. Thalluri, K. Guha, K.G. Sravani, Fabrication and characterization of capacitive RF MEMS perforated switch. IEEE Access 6, 77519–77528 (2018)

    Article  Google Scholar 

  15. K.Girija Sravani, K. Srinivasa Rao, Analysis of RF MEMS shunt capacitive switch with uniform and non-uniform meanders. Microsyst. Technol. 24(2), 1309–1315 (2018)

    Article  Google Scholar 

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Acknowledgements

The Authors would like to thank to National MEMS Design Centre, NIT Silchar, Asam for providing the necessary FEM tools.

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Authors and Affiliations

  1. Department of ECE, Mizoram University, Mizoram, India

    Ch. Gopichand, Reshmi Maity & N. P. Maity

  2. Department of ECE, Koneru Lakshmaiah Education Foundation, Guntur, Andhra Pradesh, India

    K. Srinivasa Rao

  3. Department of ECE, National Institute of Technology, Silchar, India

    Koushik Guha

  4. Department of ECE, Indian Institute of Science Engineering and Technology, Sholapur, West Bengal, India

    Santanu Maity

  5. Department of Mechanical Engineering, Khalifa University, Abu Dubai, UAE

    Ameen Eisnawi

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  1. Ch. Gopichand
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  2. Reshmi Maity
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  3. N. P. Maity
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  4. K. Srinivasa Rao
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  5. Koushik Guha
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Correspondence to Ch. Gopichand.

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Gopichand, C., Maity, R., Maity, N.P. et al. Design of a Non-uniform Serpentine Asymmetric Cantilever RF-MEMS Shunt Capacitive Switch for RADAR Applications. Trans. Electr. Electron. Mater. 21, 406–412 (2020). https://doi.org/10.1007/s42341-020-00193-0

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  • DOI: https://doi.org/10.1007/s42341-020-00193-0

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