Abstract
As a crucial part in micro-electromechanical manufacture, local ultra-precision processing of highly ductile copper is expected to be realized by fluid jet polishing (FJP), which widely utilized in optical elements. Since copper exhibits different wear behavior from stiff and brittle material, there is currently no abrasive wear prediction model applicable for copper to investigate the polishing mechanism. This research reveals that the copper material removal is dominated by deformation wear rather than cutting wear through abrasive jet impact experiments and localized wear scars analysis. A three-dimensional gas-liquid-particle triphasic wear model for copper in FJP is developed by considering impact energy and wear mechanism simultaneously. Ultimately, validation assessments at various working pressures and impingement angles achieve the goodness-of-fit up to 0.92–0.97 in quantitative comparison between simulations and experimental measurements, which demonstrate the wear prediction ability of the proposed model. This investigation facilitates a better understanding of copper wear mechanism and provides theoretical guidance for FJP process optimization.
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Abbreviations
- V p :
-
Particle velocity
- t :
-
Time
- F D :
-
Drag force per unit particle mass
- U :
-
Fluid velocity
- g :
-
Acceleration of gravity
- ρ p :
-
Particle density
- ρ :
-
Fluid density
- F :
-
Additional forces
- μ :
-
Fluid dynamic viscosity
- d p :
-
Particle diameter
- Re :
-
Reynolds number
- C D :
-
Drag coefficient
- E(α):
-
Material volume removed per mass of particles
- E 90 :
-
Material removal under normal particle impact
- f(α):
-
Particle impact angle dependence of wear damage
- α :
-
Impact angle between particle and workpiece surface
- K :
-
Constant regulated the wear depth
- Hv :
-
Vickers hardness of the workpiece material
- V*:
-
Reference impact velocity
- d*:
-
Reference particle diameter
- k 1 :
-
Coefficient related to hardness
- k 2 :
-
Coefficient related to impact velocity
- k 3 :
-
Coefficient related to particle diameter
- n 1, n 2 :
-
Coefficient related to particle impact angle
- S 1, q 1, S 2, q 2 :
-
Coefficient related to impact conditions
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Acknowledgements
This work was supported by the National Natural Science Foundation of China (Grant No. 52175175) and Shenzhen Science and Technology Program (No. JCYJ20220818102809020).
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Wenjing ZHANG. She received bachelor degree in mechanical engineering in 2020 from Beijing University of Chemical Technology, Beijing, China. Then, she is a postgraduate student in the State Key Laboratory of Tribology in Advanced Equipment at Tsinghua University. Her current research interests include material removal mechanism of fluid jet polishing and wear modeling based on computational fluid dynamics.
Xin ZHANG. She received her Ph.D. degree in chemical engineering & technology in 2019 from Beijing University of Chemical Technology, Beijing, China. She joined the State Key Laboratory of Tribology in Advanced Equipment at Tsinghua University, Beijing, China, from 2020. Her current position is a postdoc of the laboratory. Her research areas cover the ultrafine polishing technology of functional slurry and lignocellulosic functional micro/nano friction materials.
Dan GUO. She received her M.S. degree in engineering mechanics in 1995 from Xi’an Jiaotong University, Xi’an, China, and her Ph.D. degree in engineering mechanics in 1999 from Tsinghua University, Beijing, China. She joined the State Key Laboratory of Tribology in Advanced Equipment at Tsinghua University, Beijing, China, from 1999. Her current position is a professor and the deputy director of the laboratory. Her research areas cover the properties of friction at the micro/nanoscale, mechanism of interaction among nanoparticles and surface in ultra-smooth surface planarization, and the formation and failure of lubricant film in harsh conditions.
Guoshun PAN. He received his M.S. degree in solid mechanics in 1992 from Shandong University of Technology, Shandong, China, and his Ph.D. degree in mechanical engineering in 1998 from China University of Mining and Technology, Beijing, China. He joined the State Key Laboratory of Tribology in Advanced Equipment at Tsinghua University, Beijing, China. His current position is associate professor of the laboratory. His research areas cover the properties of ultra-fine surface processing and micro-nano manufacturing.
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Zhang, W., Zhang, X., Ai, T. et al. Wear behavior of copper material removal during fluid jet polishing: A comparative study between experiment and simulation. Friction (2024). https://doi.org/10.1007/s40544-023-0771-5
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DOI: https://doi.org/10.1007/s40544-023-0771-5