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Toward Understanding the Adsorption And Inhibition Mechanism of Cu-MBTA Passivation Film on Copper Surface: A Combined Experimental and DFT Investigation

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Abstract

The adsorption and passivation reactions of 5-methyl benzotriazole (MBTA) with different copper samples (as received, citric acid treated and citric acid and KIO4 treated) were studied. The experiments were characterized by contact angle measurement, potentiodynamic polarization curve, electrochemical impedance spectroscopy and X-ray photoelectron spectroscopy. The results showed that the adsorption behavior of MBTA on different treated surfaces was different and MBTA was preferentially adsorbed on the surface of citric acid treated copper. Based on the density functional theory, quantum chemical descriptors such as the frontier molecular orbital energies EHOMO, ELUMO and the energy gap between them, molecular electrostatic potential, and Fukui function had been calculated and discussed. The adsorption mechanism of MBTA and copper surface was further revealed, which had positive significance for the corrosion inhibition of copper surface in copper interconnection CMP.

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Acknowledgements

This work was supported by the Major National Science and Technology Special Projects (No. 2016ZX02301003-004-007), the Natural Science Foundation, China (No. 61704046), and the Hebei Natural Science Foundation Project (No. F2018202174). The authors thank the teachers and classmates for helpful discussions.

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Authors and Affiliations

  1. School of Electronics and Information Engineering, Hebei University of Technology, Tianjin, 300130, China

    Mengrui Liu, Da Yin, Baimei Tan, Fan Yang, Xiaoqin Sun, Pengcheng Gao, Shihao Zhang & Yazhen Wang

  2. Tianjin Key Laboratory of Electronic Materials and Devices, Tianjin, 300130, China

    Mengrui Liu, Da Yin, Baimei Tan, Fan Yang, Xiaoqin Sun, Pengcheng Gao, Shihao Zhang & Yazhen Wang

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  1. Mengrui Liu
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Correspondence to Baimei Tan or Fan Yang.

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Liu, M., Yin, D., Tan, B. et al. Toward Understanding the Adsorption And Inhibition Mechanism of Cu-MBTA Passivation Film on Copper Surface: A Combined Experimental and DFT Investigation. Electron. Mater. Lett. 17, 109–118 (2021). https://doi.org/10.1007/s13391-020-00255-8

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