Abstract
In this article, the impact of hydrogenation on the electrical properties of impurity (Fe)-contaminated silicon grain boundaries (GBs) is investigated using capacitance-voltage (C-V) and capacitance transient (C-t) techniques with hybrid orientation direct-silicon-bonded (DSB) wafers. The samples consist of a 2.3 μm thick (110) Si layer on a p-type (100) Si substrate produced via hydrophilic wafer bonding, cleavage, and epithickening. It was found that for a relatively clean GB, the density of the GB states (D GB ) is ∼6 × 1012 eV−1cm−2, and the charge neutral level is ∼0.53 eV from the valance band. D GB increases to more than 2 × 1013 eV−1cm−2after the Fe contamination, which is reduced to ∼1 × 1013 eV−1cm−2 after the hydrogenation treatment. The charge neutral level, which shifts toward the conduction band after the Fe contamination, is reversed after hydrogenation.
Similar content being viewed by others
References
L. Carnel, I. Gordon, D. Van Gestel, G. Beaucarne, J. Poortmans, and A. Stesmans, J. Appl. Phys. 100, 063702 (2006).
Y. H. Yang, K. M. Ahn, S. M. Kang, S. H. Moon, and B. T. Ahn, Electron. Mater. Lett. 10, 1103 (2014).
H. Zhang, Z. Li, J. Qian, Q. Guan, X. Du, Y. Cui, and J. Zhang, Electron. Mater. Lett. 10, 433 (2014).
G. E. Pike, Phys. Rev. B 30, 795 (1984).
A. W. Degroot, G. C. McGonigal, D. J. Thomson, and H. C. Card, J. Appl. Phys. 55, 312 (1984).
C. H. Seager, J. Appl. Phys. 52, 3960 (1981).
F. Cleri, P. Keblinski, L. Colombo, S. R. Phillpot, and D. Wolf, Phys. Rev. B 57, 6247 (1998).
J. Chen, D. Yang, Z. Xi, and T. Sekiguchi, J. Appl. Phys. 97, 033701 (2005).
M. Yang, V. W. C. Chan, K. K. Chan, L. Shi, D. M. Fried, J. H. Stathis, A. I. Chou, E. Gusev, J. A. Ott, L. E. Burns, M. V. Fischetti, and M. Ieong, IEEE Trans. Electron. Devices 53, 965 (2006).
A. J. Tavendale, A. A. Williams, and S. J. Pearton, Appl. Phys. Lett. 48, 590 (1986).
T. Zundel and J. Weber, Phys. Rev. B 43, 4361 (1991).
Y. Park, J. Lu, and G. Rozgonyi, Electron Mater. Lett. 6, 1 (2010).
C. H. Seager, G. E. Pike, and D. S. Ginley, Phys. Rev. Lett. 43, 532 (1979).
Y. Park, J. Lu, and G. Rozgonyi, J. Appl. Phys. 105, 014912 (2009).
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Park, Y., Lu, J., Park, JH. et al. The influence of hydrogenation on the electrical properties of impurity-contaminated silicon grain boundaries. Electron. Mater. Lett. 11, 993–997 (2015). https://doi.org/10.1007/s13391-015-5214-7
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s13391-015-5214-7