Skip to main content
SpringerLink
Log in

Thermoelectric properties of p-type Bi-Sb-Te thin films with various compositions using a combinatorial method

  • Published:
Electronic Materials Letters Aims and scope Submit manuscript

Abstract

Bismuth-telluride-based materials have excellent room-temperature thermoelectric properties. In this study, the composition of Bi-Sb-Te thin films deposited by RF magnetron sputtering was systematically varied across a single wafer. X-ray diffraction, field emission-scanning electron microscopy (FE-SEM, JEOL, JSM-7000F), energy dispersive x-ray spectroscopy (EDS) and an electron probe x-ray micro analyzer (EPMA, JEOL, JXA 8800R) were then used to investigate the thermoelectric properties of the Bi-Te films as a function of the Te fraction. The Te content of the films ranged from 45% to 87%, and their microstructure and crystal structure varied depending on the Te content. The Seebeck coefficients of the Bi-Sb-Te thin films range from +88 μV/K to +375 μV/K, and the maximum power factor of the films was 105 × 10−5 W/K2 m without post annealing.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. D. H. Kim, G. H. Lee and O. J. Kim, Semicond. Sci. Tech. 22, 132 (2007).

    Article  CAS  Google Scholar 

  2. L. M. Goncalves, P. Alpuim, G. Min, D. M. Rowe, C. Couto, and J. H. Correia, Vacuum 82 1499 (2008).

    Article  CAS  Google Scholar 

  3. C. LaBounty, A. Shakouri, and J. E. Bowers, J. Appl. Phys. 89,7, 4059 (2001).

    Article  CAS  Google Scholar 

  4. A. Li Bassi, A. Bailini, C. S. Casari, F. Donati, A. Mantegazza, M. Passoni, V. Russo, and C. E. Bottani, J. Appl. Phys. 105, 124307 (2009).

    Article  Google Scholar 

  5. H. Kawamoto, Sci. Tech. Trends 30, 54 (2009).

    Google Scholar 

  6. J. W. G. Bos, H. W. Zandbergen, M. H. Lee, N. P. Ong, and R. J. Cava, Phys. Rev. B 75, 195203 (2007).

    Article  Google Scholar 

  7. D. Bourgault, C. Giroud Garampon, N. Caillault, L. Carbone, and J. A. Aymami, Thin Solid Films 516, 8579 (2008).

    Article  CAS  Google Scholar 

  8. D. H. Kim, E. Byon, G. H. Lee, and S. Cho, Thin Solid Films 510, 148 (2006).

    Article  CAS  Google Scholar 

  9. X. A. Fan, J. Y. Yang, W. Zhu, H. S. Yun, R. G. Chen, S. Q. Bao, and X. K. Duan, J. Alloy Compd. 420, 256 (2006).

    Article  CAS  Google Scholar 

  10. K. W. Cho and I. H. Kim, Mater. Lett. 59, 966 (2005).

    Article  CAS  Google Scholar 

  11. H. Noro, K. Sato, and H. Kagechhika, J. Appl. Phys. 73,3, 1252 (1993).

    Article  CAS  Google Scholar 

  12. R. S. Makala, K. Jagannadham, and B. C. Sales, J. Appl. Phys. 94,6, 3907 (2003).

    Article  CAS  Google Scholar 

  13. S. D. Kwon, B. K. Ju, S. J. Yoon, and J. S. Kim, J. Electron. Mater. 38,7, 920 (2009).

    Article  CAS  Google Scholar 

  14. D. H. Kim, G. H. Lee, and O. J. Kim, Semicond. Sci. Technol. 22, 132 (2007).

    Article  CAS  Google Scholar 

  15. B. Dam, R. Gremaud, C. Broedersz, and R. Griessen, Scripta Mater. 56, 853 (2007).

    Article  CAS  Google Scholar 

  16. V. Russo, A. Bailini, M. Zamboni, M. Passoni, C. Conti, C. S. Casari, A. Li Bassi, and C. E. Bottani, J. Raman Spectrosc. 39, 205 (2008).

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Nano-Mechanical Systems Research Division, Korea Institute of Machinery & Materials, Daejeon, 305-343, Korea

    Hee-Jung Lee, Seungmin Hyun, Hyun-Seong Park & Seungwoo Han

Authors
  1. Hee-Jung Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Seungmin Hyun
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Hyun-Seong Park
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Seungwoo Han
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Seungmin Hyun.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Lee, HJ., Hyun, S., Park, HS. et al. Thermoelectric properties of p-type Bi-Sb-Te thin films with various compositions using a combinatorial method. Electron. Mater. Lett. 7, 45–49 (2011). https://doi.org/10.1007/s13391-011-0307-4

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s13391-011-0307-4

Keywords

Search

Navigation